Inventor · disambiguated record
Dieter Pierreux
Also filed as: PIERREUX DIETER
47 granted patents·24 pending applications·1,562 citations·filing 2008–2025
97Inventor score
Top patents by PatentIndex Score
71 records- 0198US9916980B1Method of forming a structure on a substrateASM IP HOLDING BV·Filed 2016·Granted Mar 13, 2018·480 cites·23 claims
- 0298US9887082B1Method and apparatus for filling a gapASM IP HOLDING BV·Filed 2016·Granted Feb 6, 2018·466 cites·26 claims
- 0397US9812320B1Method and apparatus for filling a gapASM IP HOLDING BV·Filed 2016·Granted Nov 7, 2017·475 cites·38 claims
- 0496US9552979B2Cyclic aluminum nitride deposition in a batch reactorASM IP HOLDING BV·Filed 2013·Granted Jan 24, 2017·43 cites·25 claims
- 0595US8633050B2Solar cell, and method of manufacturing the samePIERREUX DIETER·Filed 2011·Granted Jan 21, 2014·40 cites·22 claims
- 0694US12077854B2Chemical vapor deposition furnace with a cleaning gas system to provide a cleaning gasASM IP HOLDING BV·Filed 2022·Granted Sep 3, 2024·1 cites·19 claims
- 0792US11501968B2Method for providing a semiconductor device with silicon filled gapsASM IP HOLDING BV·Filed 2020·Granted Nov 15, 2022·4 cites·16 claims
- 0891US9576790B2Deposition of boron and carbon containing materialsASM IP HOLDING BV·Filed 2015·Granted Feb 21, 2017·7 cites·26 claims
- 0989US11088002B2Substrate rack and a substrate processing system and methodASM IP HOLDING BV·Filed 2018·Granted Aug 10, 2021·7 cites·23 claims
- 1088US11898243B2Method of forming vanadium nitride-containing layerASM IP HOLDING BV·Filed 2020·Granted Feb 13, 2024·2 cites·14 claims
- 1188US11447861B2Sequential infiltration synthesis apparatus and a method of forming a patterned structureASM IP HOLDING BV·Filed 2016·Granted Sep 20, 2022·4 cites·13 claims
- 1288US10056249B2Atomic layer deposition of antimony oxide filmsASM INT NV·Filed 2016·Granted Aug 21, 2018·4 cites·20 claims
- 1384US11990333B2Method and apparatus for filling a gapASM IP HOLDING BV·Filed 2023·Granted May 21, 2024·0 cites·20 claims
- 1484US2024392435A1Chemical vapor deposition furnace with a cleaning gas system to provide a cleaning gasASM IP HOLDING BV·Filed 2024·Application pending·0 cites
- 1582US11594450B2Method for forming a structure with a holeASM IP HOLDING BV·Filed 2020·Granted Feb 28, 2023·1 cites·32 claims
- 1682US11230766B2Substrate processing apparatus and methodASM IP HOLDING BV·Filed 2018·Granted Jan 25, 2022·3 cites·13 claims
- 1782US8399344B2Method for adjusting the threshold voltage of a gate stack of a PMOS devicePIERREUX DIETER·Filed 2010·Granted Mar 19, 2013·7 cites·9 claims
- 1881US11629407B2Substrate processing apparatus and method for processing substratesASM IP HOLDING BV·Filed 2020·Granted Apr 18, 2023·1 cites·27 claims
- 1981US10460932B2Semiconductor device with amorphous silicon filled gaps and methods for formingASM IP HOLDING BV·Filed 2017·Granted Oct 29, 2019·3 cites·23 claims
- 2080US10343907B2Method and system for delivering hydrogen peroxide to a semiconductor processing chamberASM IP HOLDING BV·Filed 2015·Granted Jul 9, 2019·3 cites·11 claims
- 2177US12448683B2Method of forming a vanadium nitride-containing layerASM IP HOLDING BV·Filed 2024·Granted Oct 21, 2025·0 cites·20 claims
- 2277US11694892B2Method and apparatus for filling a gapASM IP HOLDING BV·Filed 2021·Granted Jul 4, 2023·0 cites·20 claims
- 2377US11549177B2Process for passivating dielectric filmsASM INT NV·Filed 2019·Granted Jan 10, 2023·0 cites·19 claims
- 2477US10741385B2Method and apparatus for filling a gapASM IP HOLDING BV·Filed 2017·Granted Aug 11, 2020·1 cites·27 claims
- 2576US12000042B2Sequential infiltration synthesis apparatus and a method of forming a patterned structureASM IP HOLDING BV·Filed 2022·Granted Jun 4, 2024·0 cites·16 claims
- 2676US11532757B2Deposition of charge trapping layersASM IP HOLDING BV·Filed 2017·Granted Dec 20, 2022·2 cites·19 claims
- 2776US10513772B2Process for passivating dielectric filmsBLOMBERG TOM E·Filed 2010·Granted Dec 24, 2019·1 cites·10 claims
- 2876US9837281B2Cyclic doped aluminum nitride depositionASM IP HOLDING BV·Filed 2016·Granted Dec 5, 2017·2 cites·12 claims
- 2974US9006112B2Atomic layer deposition of antimony oxide filmsASM INT·Filed 2012·Granted Apr 14, 2015·2 cites·18 claims
- 3073US12410522B2Substrate processing apparatus and method for processing substratesASM IP HOLDING BV·Filed 2023·Granted Sep 9, 2025·0 cites·20 claims
- 3173US12040229B2Method for forming a structure with a holeASM IP HOLDING BV·Filed 2022·Granted Jul 16, 2024·0 cites·28 claims
- 3272US11107676B2Method and apparatus for filling a gapASM IP HOLDING BV·Filed 2020·Granted Aug 31, 2021·0 cites·20 claims
- 3372US2024274437A1Methods of forming structures including silicon germanium and silicon layers, devices formed using the methods, and systems for performing the methodsASM IP HOLDING BV·Filed 2024·Application pending·0 cites
- 3470US10199223B2Semiconductor device fabrication using etch stop layerASM IP HOLDING BV·Filed 2017·Granted Feb 5, 2019·1 cites·18 claims
- 3570US2025092520A1Semiconductor manufacturing apparatus and processASM IP HOLDING BV·Filed 2024·Application pending·0 cites
- 3669US11851755B2Sequential infiltration synthesis apparatus and a method of forming a patterned structureASM IP HOLDING BV·Filed 2020·Granted Dec 26, 2023·0 cites·20 claims
- 3769US9514934B2Atomic layer deposition of antimony oxide filmsASM INT NV·Filed 2015·Granted Dec 6, 2016·1 cites·20 claims
- 3868US9431238B2Reactive curing process for semiconductor substratesASM IP HOLDING BV·Filed 2015·Granted Aug 30, 2016·1 cites·31 claims
- 3967US11646204B2Method for forming a layer provided with siliconASM IP HOLDING BV·Filed 2021·Granted May 9, 2023·0 cites·20 claims
- 4067US2023230833A1Method for forming a layer provided with siliconASM IP HOLDING BV·Filed 2023·Application pending·0 cites
- 4167US2024229237A9Ald deposition method and systemASM IP HOLDING BV·Filed 2023·Application pending·0 cites
- 4266US11996289B2Methods of forming structures including silicon germanium and silicon layers, devices formed using the methods, and systems for performing the methodsASM IP HOLDING BV·Filed 2021·Granted May 28, 2024·0 cites·7 claims
- 4365US12351902B2Methods and systems for delivery of vanadium compoundsASM IP HOLDING BV·Filed 2021·Granted Jul 8, 2025·0 cites·16 claims
- 4465US2024175137A1Vapor phase precursor delivery systemASM IP HOLDING BV·Filed 2023·Application pending·0 cites
- 4563US2024425984A1Method of forming a layer by aldASM IP HOLDING BV·Filed 2024·Application pending·0 cites
- 4663US2025059644A1Semiconductor processing system, a semiconductor precursor storage vessel and a method of forming a silicon comprising layerASM IP HOLDING BV·Filed 2024·Application pending·0 cites
- 4762US10699899B2Atomic layer deposition of antimony oxide filmsASM INT NV·Filed 2018·Granted Jun 30, 2020·0 cites·19 claims
- 4861US2025079159A1Method for improved silicon depositionASM IP HOLDING BV·Filed 2024·Application pending·0 cites
- 4960US2024191351A1Substrate processing systemASM IP HOLDING BV·Filed 2023·Application pending·0 cites
- 5059US2023002889A1Chemical vapor depospition furnace for depositing filmsASM IP HOLDING BV·Filed 2022·Application pending·0 cites
Showing the top 50 of 71 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →