Inventor · disambiguated record
Erich Thallner
Also filed as: THALLNER ERICH
46 granted patents·9 pending applications·293 citations·filing 1998–2018
97Inventor score
Top patents by PatentIndex Score
55 records- 0194US7909374B2Handling device and handling method for wafersTHALLNER ERICH·Filed 2007·Granted Mar 22, 2011·24 cites·15 claims
- 0293US7910454B2Combination of a substrate and a waferTHALLNER ERICH·Filed 2006·Granted Mar 22, 2011·14 cites·28 claims
- 0391US8443864B2Device for stripping a wafer from a carrierTHALLNER ERICH·Filed 2010·Granted May 21, 2013·10 cites·23 claims
- 0489US6792991B2Device for detaching a carrier from a semi-conductor diskFiled 2002·Granted Sep 21, 2004·53 cites·11 claims
- 0588US9418882B2Device and method for aligning substratesEV GROUP E THALLNER GMBH·Filed 2013·Granted Aug 16, 2016·9 cites·11 claims
- 0688US8536020B2Combination of a substrate and a waferTHALLNER ERICH·Filed 2012·Granted Sep 17, 2013·5 cites·7 claims
- 0787US6214692B1Method and apparatus for the aligned joining of disk-shaped semiconductor substratesFiled 1998·Granted Apr 10, 2001·93 cites·6 claims
- 0886US9666470B2Receptacle device, device and method for handling substrate stacksEV GROUP E THALLNER GMBH·Filed 2013·Granted May 30, 2017·5 cites·20 claims
- 0985US8157615B2Device and process for applying and/or detaching a wafer to/from a carrierTHALLNER ERICH·Filed 2009·Granted Apr 17, 2012·10 cites·15 claims
- 1082US8087708B2Handling device and handling method for wafersTHALLNER ERICH·Filed 2011·Granted Jan 3, 2012·4 cites·7 claims
- 1179US8293063B2Combination of a substrate and a waferTHALLNER ERICH·Filed 2012·Granted Oct 23, 2012·2 cites·6 claims
- 1278US8157307B2Handling device and handling method for wafersTHALLNER ERICH·Filed 2011·Granted Apr 17, 2012·3 cites·8 claims
- 1377US8156981B2Combination of a substrate and a waferTHALLNER ERICH·Filed 2010·Granted Apr 17, 2012·2 cites·20 claims
- 1477US6416579B1Apparatus for treating silicon wafersFiled 2000·Granted Jul 9, 2002·21 cites·15 claims
- 1575US8586132B2Device and method for coating a micro- and/or nano-structured structural substrate and coated structural substrateTHALLNER ERICH·Filed 2012·Granted Nov 19, 2013·4 cites·19 claims
- 1674US9941149B2Receptacle device, device and method for handling substrate stacksEV GROUP E THALLNER GMBH·Filed 2017·Granted Apr 10, 2018·1 cites·5 claims
- 1771US7811898B2Method and device for bonding wafersTHALLNER ERICH·Filed 2006·Granted Oct 12, 2010·3 cites·13 claims
- 1870US10279551B2Method for producing a microlensEV GROUP GMBH·Filed 2018·Granted May 7, 2019·0 cites·14 claims
- 1970US8926775B2Method and device for bonding two wafersTHALLNER ERICH·Filed 2012·Granted Jan 6, 2015·2 cites·12 claims
- 2068US9682539B2Substrate composite, method and device for bonding of substratesTHALLNER ERICH·Filed 2012·Granted Jun 20, 2017·2 cites·14 claims
- 2168US7998833B2Method for bonding wafersTHALLNER ERICH·Filed 2009·Granted Aug 16, 2011·2 cites·13 claims
- 2267US9478501B2Substrate processing and alignmentTHALLNER ERICH·Filed 2007·Granted Oct 25, 2016·2 cites·20 claims
- 2367US8118290B2Method for holding wafers and device for fixing two parallel arranged wafers relative to one anotherTHALLNER ERICH·Filed 2007·Granted Feb 21, 2012·2 cites·11 claims
- 2467US6485568B1Apparatus for coating substrates with materials, particularly for lacquering si-wafersFiled 2000·Granted Nov 26, 2002·11 cites·5 claims
- 2565US10014202B2Device and method for aligning substratesTHALLNER ERICH·Filed 2012·Granted Jul 3, 2018·1 cites·15 claims
- 2664US9052422B2Method and device for producing a microlensTHALLNER ERICH·Filed 2010·Granted Jun 9, 2015·1 cites·8 claims
- 2764US8142701B2Method and device for producing a nanopatterned discTHALLNER ERICH·Filed 2008·Granted Mar 27, 2012·1 cites·6 claims
- 2863US9343348B2Substrate-product substrate combination and device and method for producing a substrate-product substrate combinationTHALLNER ERICH·Filed 2012·Granted May 17, 2016·1 cites·4 claims
- 2962US7547611B2Process and device for bonding wafersTHALLNER ERICH·Filed 2007·Granted Jun 16, 2009·1 cites·10 claims
- 3061US8802542B2Combination of a substrate and a waferTHALLNER ERICH·Filed 2013·Granted Aug 12, 2014·0 cites·9 claims
- 3159US10347523B2Receptacle device, device and method for handling substrate stacksEV GROUP E THALLNER GMBH·Filed 2018·Granted Jul 9, 2019·0 cites·15 claims
- 3259US8664082B2Combination of a substrate and a waferTHALLNER ERICH·Filed 2013·Granted Mar 4, 2014·0 cites·3 claims
- 3359US2015231840A1Method and device for producing a microlensEV GROUP GMBH·Filed 2015·Application pending·0 cites
- 3456US8905111B2Device for releasing an interconnect layer that provides connection between a carrier and a waferEV GROUP GMBH·Filed 2013·Granted Dec 9, 2014·0 cites·18 claims
- 3556US8349701B2Combination of a substrate and a waferTHALLNER ERICH·Filed 2010·Granted Jan 8, 2013·0 cites·26 claims
- 3655US8603294B2Method for stripping a wafer from a carrierEV GROUP GMBH·Filed 2013·Granted Dec 10, 2013·0 cites·9 claims
- 3755US7246445B2Alignment deviceTHALLNER ERICH·Filed 2004·Granted Jul 24, 2007·4 cites·18 claims
- 3854US8591794B2Method and device for producing a nanopatterned discTHALLNER ERICH·Filed 2011·Granted Nov 26, 2013·0 cites·6 claims
- 3953US8875766B2Device and method for the application of a sheet-like jointing means onto a contact area of a waferTHALLNER ERICH·Filed 2013·Granted Nov 4, 2014·0 cites·10 claims
- 4053US2018269096A1Device and method for aligning substratesTHALLNER ERICH·Filed 2018·Application pending·0 cites
- 4151US2009274872A1Device and Method for Coating a Micro-and/or Nano-Structured Structural Substrate and Coated Structural SubstrateTHALLNER ERICH·Filed 2007·Application pending·0 cites
- 4250US7722350B2Apparatus for imprinting and/or embossing substratesTHALLNER ERICH·Filed 2008·Granted May 25, 2010·0 cites·14 claims
- 4349US8500930B2Device and method for the application of a sheet-like jointing means onto a contact area of a waferTHALLNER ERICH·Filed 2005·Granted Aug 6, 2013·0 cites·8 claims
- 4449US2017033053A1Substrate processing and alignmentTHALLNER ERICH·Filed 2016·Application pending·0 cites
- 4548US8212989B2Device for transferring structures which are provided in a mask onto a substrateTHALLNER ERICH·Filed 2008·Granted Jul 3, 2012·0 cites·18 claims
- 4648US7598152B2Device and method for bonding wafersTHALLNER ERICH·Filed 2005·Granted Oct 6, 2009·0 cites·9 claims
- 4746US10276409B2Sample holder, device and method for detaching of a first substrateTHALLNER ERICH·Filed 2014·Granted Apr 30, 2019·0 cites·15 claims
- 4845US2009158947A1Stamp Comprising a Nanostamping Structure, Device and Method for the Production ThereofTHALLNER ERICH·Filed 2006·Application pending·0 cites
- 4943US7432701B2Adjusting device and arrangement for adjusting a waferTHALLNER ERICH·Filed 2005·Granted Oct 7, 2008·0 cites·19 claims
- 5042US6727983B2Adjustment tableFiled 2002·Granted Apr 27, 2004·0 cites·11 claims
Showing the top 50 of 55 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →