Inventor · disambiguated record
Joshua Collins
Also filed as: COLLINS JOSHUA · COLLINS JOSHUA E
59 granted patents·21 pending applications·2,953 citations·filing 1996–2025
99Inventor score
Files withLAM RES CORP29INTELLIGENT MAT SOLUTIONS INC17NOVELLUS SYSTEMS INC13APPLIED MATERIALS INC11AEROQUIP CORP2
Top patents by PatentIndex Score
80 records- 0198US8043972B1Adsorption based material removal processNOVELLUS SYSTEMS INC·Filed 2008·Granted Oct 25, 2011·537 cites·29 claims
- 0298US7955972B2Methods for growing low-resistivity tungsten for high aspect ratio and small featuresNOVELLUS SYSTEMS INC·Filed 2008·Granted Jun 7, 2011·87 cites·22 claims
- 0398US7691749B2Deposition of tungsten nitrideNOVELLUS SYSTEMS INC·Filed 2005·Granted Apr 6, 2010·97 cites·18 claims
- 0498US7589017B2Methods for growing low-resistivity tungsten filmNOVELLUS SYSTEMS INC·Filed 2005·Granted Sep 15, 2009·103 cites·21 claims
- 0598US7416989B1Adsorption based material removal processNOVELLUS SYSTEMS INC·Filed 2006·Granted Aug 26, 2008·378 cites·30 claims
- 0698US6635965B1Method for producing ultra-thin tungsten layers with improved step coverageNOVELLUS SYSTEMS INC·Filed 2001·Granted Oct 21, 2003·245 cites·39 claims
- 0797US11970776B2Atomic layer deposition of metal filmsLAM RES CORP·Filed 2020·Granted Apr 30, 2024·9 cites·22 claims
- 0897US11549175B2Method of depositing tungsten and other metals in 3D NAND structuresLAM RES CORP·Filed 2019·Granted Jan 10, 2023·17 cites·22 claims
- 0997US10573522B2Method for preventing line bending during metal fill processLAM RES CORP·Filed 2017·Granted Feb 25, 2020·38 cites·20 claims
- 1097US9758724B2Morphologically and size uniform monodisperse particles and their shape-directed self-assemblyINTELLIGENT MAT SOLUTIONS INC·Filed 2015·Granted Sep 12, 2017·42 cites·32 claims
- 1197US9595470B2Methods of preparing tungsten and tungsten nitride thin films using tungsten chloride precursorLAM RES CORP·Filed 2015·Granted Mar 14, 2017·27 cites·14 claims
- 1297US9583385B2Method for producing ultra-thin tungsten layers with improved step coverageNOVELLUS SYSTEMS INC·Filed 2015·Granted Feb 28, 2017·31 cites·27 claims
- 1397US8900999B1Low temperature high pressure high H2/WF6 ratio W process for 3D NAND applicationAPPLIED MATERIALS INC·Filed 2013·Granted Dec 2, 2014·423 cites·15 claims
- 1497US8409985B2Methods for growing low-resistivity tungsten for high aspect ratio and small featuresCHAN LANA HIULUI·Filed 2011·Granted Apr 2, 2013·59 cites·21 claims
- 1597US8048805B2Methods for growing low-resistivity tungsten filmNOVELLUS SYSTEMS INC·Filed 2009·Granted Nov 1, 2011·47 cites·18 claims
- 1697US7754604B2Reducing silicon attack and improving resistivity of tungsten nitride filmNOVELLUS SYSTEMS INC·Filed 2006·Granted Jul 13, 2010·56 cites·20 claims
- 1797US7141494B2Method for reducing tungsten film roughness and improving step coverageNOVELLUS SYSTEMS INC·Filed 2003·Granted Nov 28, 2006·147 cites·32 claims
- 1897US7005372B2Deposition of tungsten nitrideNOVELLUS SYSTEMS INC·Filed 2003·Granted Feb 28, 2006·187 cites·46 claims
- 1996US11355345B2Method for preventing line bending during metal fill processLAM RES CORP·Filed 2019·Granted Jun 7, 2022·21 cites·14 claims
- 2096US10777453B2Low resistivity films containing molybdenumLAM RES CORP·Filed 2019·Granted Sep 15, 2020·18 cites·20 claims
- 2196US10510590B2Low resistivity films containing molybdenumLAM RES CORP·Filed 2018·Granted Dec 17, 2019·26 cites·20 claims
- 2296US9978605B2Method of forming low resistivity fluorine free tungsten film without nucleationLAM RES CORP·Filed 2017·Granted May 22, 2018·23 cites·23 claims
- 2395US12362188B2Method for preventing line bending during metal fill processLAM RES CORP·Filed 2022·Granted Jul 15, 2025·2 cites·14 claims
- 2495US12351914B2Deposition of films using molybdenum precursorsLAM RES CORP·Filed 2022·Granted Jul 8, 2025·2 cites·16 claims
- 2595US9181477B2Morphologically and size uniform monodisperse particles and their shape-directed self-assemblyCOLLINS JOSHUA E·Filed 2011·Granted Nov 10, 2015·51 cites·27 claims
- 2695US9076843B2Method for producing ultra-thin tungsten layers with improved step coverageNOVELLUS SYSTEMS INC·Filed 2012·Granted Jul 7, 2015·23 cites·18 claims
- 2795US7262125B2Method of forming low-resistivity tungsten interconnectsNOVELLUS SYSTEMS INC·Filed 2004·Granted Aug 28, 2007·91 cites·32 claims
- 2893US9169556B2Tungsten growth modulation by controlling surface compositionAPPLIED MATERIALS INC·Filed 2013·Granted Oct 27, 2015·9 cites·20 claims
- 2992US12327762B2Molybdenum fillLAM RES CORP·Filed 2020·Granted Jun 10, 2025·3 cites·25 claims
- 3092US10921815B2Cooperative guidanceINTELLIGENT MAT SOLUTIONS INC·Filed 2017·Granted Feb 16, 2021·5 cites·19 claims
- 3192US10546751B2Forming low resistivity fluorine free tungsten film without nucleationLAM RES CORP·Filed 2018·Granted Jan 28, 2020·8 cites·19 claims
- 3291US5863023AValved coupling for ultra high purtiy gas distribution systemAEROQUIP CORP·Filed 1997·Granted Jan 26, 1999·57 cites·9 claims
- 3390US10273407B2Morphologically and size uniform monodisperse particles and their shape-directed self-assemblyINTELLIGENT MAT SOLUTIONS INC·Filed 2018·Granted Apr 30, 2019·2 cites·20 claims
- 3489US7409833B2Dual mode compressor with automatic compression ratio adjustment for adapting to multiple operating conditionsSUNPOWER INC·Filed 2005·Granted Aug 12, 2008·16 cites·17 claims
- 3588US10087523B2Vapor delivery method and apparatus for solid and liquid precursorsLAM RES CORP·Filed 2017·Granted Oct 2, 2018·5 cites·23 claims
- 3686US8617985B2High temperature tungsten metallization processAPPLIED MATERIALS INC·Filed 2012·Granted Dec 31, 2013·7 cites·19 claims
- 3786US2025323045A1Method for preventing line bending during metal fill processLAM RES CORP·Filed 2025·Application pending·0 cites
- 3885US10066163B2Morphologically and size uniform monodisperse particles and their shape-directed self-assemblyINTELLIGENT MAT SOLUTIONS INC·Filed 2017·Granted Sep 4, 2018·1 cites·20 claims
- 3985US2024297075A1Low resistivity films containing molybdenumLAM RES CORP·Filed 2024·Application pending·0 cites
- 4083US9245769B2Directional SiO2 etch using plasma pre-treatment and high-temperature etchant depositionAPPLIED MATERIALS INC·Filed 2014·Granted Jan 26, 2016·4 cites·20 claims
- 4182US9177780B2Directional SiO2 etch using plasma pre-treatment and high-temperature etchant depositionAPPLIED MATERIALS INC·Filed 2013·Granted Nov 3, 2015·5 cites·20 claims
- 4281US10214807B2Atomic layer deposition of tungsten for enhanced fill and reduced substrate attackLAM RES CORP·Filed 2016·Granted Feb 26, 2019·3 cites·14 claims
- 4380US8980761B2Directional SIO2 etch using low-temperature etchant deposition and plasma post-treatmentAPPLIED MATERIALS INC·Filed 2013·Granted Mar 17, 2015·4 cites·20 claims
- 4480US8835311B2High temperature tungsten metallization processAPPLIED MATERIAL INC·Filed 2013·Granted Sep 16, 2014·4 cites·19 claims
- 4579US9665815B2Transaction cardINTELLIGENT MAT SOLUTIONS INC·Filed 2015·Granted May 30, 2017·2 cites·14 claims
- 4677US2025137125A1Vapor accumulator for corrosive gases with purgingLAM RES CORP·Filed 2024·Application pending·0 cites
- 4777US2024271281A1Deposition of metal filmsLAM RES CORP·Filed 2024·Application pending·0 cites
- 4875US2022223471A1Low resistivity films containing molybdenumLAM RES CORP·Filed 2022·Application pending·0 cites
- 4974US2019249081A1Morphologically and size uniform monodisperse particles and their shape-directed self-assemblyINTELLIGENT MAT SOLUTIONS INC·Filed 2019·Application pending·0 cites
- 5072US11667799B2Cooperative guidance system and methodINTELLIGENT MAT SOLUTIONS INC·Filed 2021·Granted Jun 6, 2023·0 cites·11 claims
Showing the top 50 of 80 patent records by PatentIndex Score.
Join the waitlist — get patent alerts
Get an alert when Joshua Collins files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →