Inventor · disambiguated record
Maosheng Zhao
Also filed as: ZHAO MAOSHENG
17 granted patents·10 pending applications·581 citations·filing 2002–2022
94Inventor score
Files withAPPLIED MATERIALS INC15ENDO RICK6INTERMOLECULAR INC4XIAMEN YUNMAO TECH CO LTD1ZHAO MAOSHENG1
Top patents by PatentIndex Score
27 records- 0196US7500445B2Method and apparatus for cleaning a CVD chamberAPPLIED MATERIALS INC·Filed 2003·Granted Mar 10, 2009·187 cites·2 claims
- 0296US6946033B2Heated gas distribution plate for a processing chamberAPPLIED MATERIALS INC·Filed 2002·Granted Sep 20, 2005·227 cites·17 claims
- 0393US6797643B2Plasma enhanced CVD low k carbon-doped silicon oxide film deposition using VHF-RF powerAPPLIED MATERIALS INC·Filed 2002·Granted Sep 28, 2004·84 cites·24 claims
- 0489US8770143B2Multi-region processing systemENDO RICK·Filed 2011·Granted Jul 8, 2014·19 cites·13 claims
- 0587US7464717B2Method for cleaning a CVD chamberAPPLIED MATERIALS INC·Filed 2006·Granted Dec 16, 2008·8 cites·11 claims
- 0687US6914014B2Method for curing low dielectric constant film using direct current biasAPPLIED MATERIALS INC·Filed 2003·Granted Jul 5, 2005·32 cites·47 claims
- 0786US8039052B2Multi-region processing system and headsINTERMOLECULAR INC·Filed 2007·Granted Oct 18, 2011·5 cites·9 claims
- 0872US8771483B2Combinatorial process systemENDO RICK·Filed 2008·Granted Jul 8, 2014·2 cites·15 claims
- 0972US8449678B2Combinatorial process systemENDO RICK·Filed 2008·Granted May 28, 2013·2 cites·18 claims
- 1071US2014311408A1Multi-Region Processing System and HeadsINTERMOLECULAR INC·Filed 2014·Application pending·0 cites
- 1170US8932995B2Combinatorial process systemENDO RICK·Filed 2011·Granted Jan 13, 2015·1 cites·11 claims
- 1270US8387563B2Combinatorial process systemENDO RICK·Filed 2012·Granted Mar 5, 2013·1 cites·9 claims
- 1368US7654224B2Method and apparatus for cleaning a CVD chamberAPPLIED MATERIALS INC·Filed 2009·Granted Feb 2, 2010·1 cites·17 claims
- 1462US6932092B2Method for cleaning plasma enhanced chemical vapor deposition chamber using very high frequency energyAPPLIED MATERIALS INC·Filed 2002·Granted Aug 23, 2005·4 cites·3 claims
- 1561US2015093898A1Combinatorial Process SystemINTERMOLECULAR INC·Filed 2014·Application pending·0 cites
- 1659US2017121813A1Method and apparatus for cleaning a cvd chamberAPPLIED MATERIALS INC·Filed 2017·Application pending·0 cites
- 1758US8758581B2Combinatorial process systemENDO RICK·Filed 2008·Granted Jun 24, 2014·0 cites·6 claims
- 1858US2014158048A1Method and apparatus for cleaning a cvd chamberAPPLIED MATERIALS INC·Filed 2014·Application pending·0 cites
- 1957US12312687B2Powder coating deviceXIAMEN YUNMAO TECH CO LTD·Filed 2022·Granted May 27, 2025·0 cites·9 claims
- 2053US7465357B2Computer-readable medium that contains software for executing a method for cleaning a CVD chamberAPPLIED MATERIALS INC·Filed 2006·Granted Dec 16, 2008·0 cites·14 claims
- 2150US2010095891A1Method and apparatus for cleaning a cvd chamberZHAO MAOSHENG·Filed 2010·Application pending·0 cites
- 2248US6923189B2Cleaning of CVD chambers using remote source with cxfyoz based chemistryAPPLIED MATERIALS INC·Filed 2003·Granted Aug 2, 2005·8 cites·13 claims
- 2341US2004052969A1Methods for operating a chemical vapor deposition chamber using a heated gas distribution plateAPPLIED MATERIALS INC·Filed 2002·Application pending·0 cites
- 2441US2005252447A1Gas blocker plate for improved depositionAPPLIED MATERIALS INC·Filed 2004·Application pending·0 cites
- 2540US2005126484A1Edge flow faceplate for improvement of CVD film propertiesAPPLIED MATERIALS INC·Filed 2004·Application pending·0 cites
- 2639US2014166840A1Substrate CarrierINTERMOLECULAR INC·Filed 2012·Application pending·0 cites
- 2738US2004118519A1Blocker plate bypass design to improve clean rate at the edge of the chamberAPPLIED MATERIALS INC·Filed 2002·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →