Inventor · disambiguated record
Oleg Byl
Also filed as: BYL OLEG
33 granted patents·18 pending applications·125 citations·filing 2007–2023
95Inventor score
Top patents by PatentIndex Score
51 records- 0197US8062965B2Isotopically-enriched boron-containing compounds, and methods of making and using sameKAIM ROBERT·Filed 2011·Granted Nov 22, 2011·21 cites·20 claims
- 0293US8598022B2Isotopically-enriched boron-containing compounds, and methods of making and using sameKAIM ROBERT·Filed 2011·Granted Dec 3, 2013·12 cites·31 claims
- 0392US11299802B2Germanium tetraflouride and hydrogen mixtures for an ion implantation systemENTEGRIS INC·Filed 2019·Granted Apr 12, 2022·6 cites·13 claims
- 0492US9205392B2Apparatus and method for preparation of compounds or intermediates thereof from a solid material, and using such compounds and intermediatesBYL OLEG·Filed 2011·Granted Dec 8, 2015·23 cites·23 claims
- 0591US8796131B2Ion implantation system and methodJONES EDWARD E·Filed 2010·Granted Aug 5, 2014·18 cites·20 claims
- 0690US11139145B2Ion implantation system with mixture of arc chamber materialsENTEGRIS INC·Filed 2020·Granted Oct 5, 2021·2 cites·20 claims
- 0788US9111860B2Ion implantation system and methodADVANCED TECH MATERIALS·Filed 2014·Granted Aug 18, 2015·6 cites·21 claims
- 0888US8603252B2Cleaning of semiconductor processing systemsDIMEO FRANK·Filed 2007·Granted Dec 10, 2013·21 cites·6 claims
- 0983US10109488B2Phosphorus or arsenic ion implantation utilizing enhanced source techniquesENTEGRIS INC·Filed 2015·Granted Oct 23, 2018·3 cites·19 claims
- 1082US12347639B2Method and systems useful for producing aluminum ionsENTEGRIS INC·Filed 2023·Granted Jul 1, 2025·0 cites·6 claims
- 1180US11827973B2Germanium tetraflouride and hydrogen mixtures for an ion implantation systemENTEGRIS INC·Filed 2022·Granted Nov 28, 2023·0 cites·20 claims
- 1280US9960042B2Carbon dopant gas and co-flow for implant beam and source life performance improvementENTEGRIS INC·Filed 2013·Granted May 1, 2018·4 cites·18 claims
- 1380US9142387B2Isotopically-enriched boron-containing compounds, and methods of making and using sameENTEGRIS INC·Filed 2013·Granted Sep 22, 2015·3 cites·11 claims
- 1476US9831063B2Ion implantation compositions, systems, and methodsENTEGRIS INC·Filed 2014·Granted Nov 28, 2017·3 cites·8 claims
- 1576US8138071B2Isotopically-enriched boron-containing compounds, and methods of making and using sameKAIM ROBERT·Filed 2010·Granted Mar 20, 2012·3 cites·10 claims
- 1673US11881376B2Method and systems useful for producing aluminum ionsENTEGRIS INC·Filed 2021·Granted Jan 23, 2024·0 cites·17 claims
- 1770US11682540B2Ion implantation system with mixture of arc chamber materialsENTEGRIS INC·Filed 2021·Granted Jun 20, 2023·0 cites·16 claims
- 1868US12140272B2Systems and methods for storing molecular diboraneENTEGRIS INC·Filed 2023·Granted Nov 12, 2024·0 cites·12 claims
- 1967US12421122B2Gas storage systems and method thereofENTEGRIS INC·Filed 2021·Granted Sep 23, 2025·0 cites·6 claims
- 2066US12196368B2Storage and delivery veseel for storing GeH4, using a zeolitic adsorbentENTEGRIS INC·Filed 2021·Granted Jan 14, 2025·0 cites·17 claims
- 2165US2020248873A1Valve assemblies and fluid storage and dispensing packages comprising sameENTEGRIS INC·Filed 2020·Application pending·0 cites
- 2264US2020051819A1Carbon materials for carbon implantationENTEGRIS INC·Filed 2019·Application pending·0 cites
- 2363US2022044908A1Fluorinated compositions for ion source performance improvements in nitrogen ion implantationENTEGRIS INC·Filed 2021·Application pending·0 cites
- 2463US2021370259A1Gas supply packages, adsorbents, and related methodsENTEGRIS INC·Filed 2021·Application pending·0 cites
- 2561US2024124776A1High performance semiconductor grade dimethylaluminum chlorideSPURGEON LAURENCE E·Filed 2023·Application pending·0 cites
- 2660US2023227309A1STORAGE AND DELIVERY VESSEL FOR STORING GeH4, USING A ZEOLITIC ADSORBENTENTEGRIS INC·Filed 2023·Application pending·0 cites
- 2759US12479028B2Metal-organic-framework-containing bodies and related methodsENTEGRIS INC·Filed 2022·Granted Nov 25, 2025·0 cites·8 claims
- 2859US11621148B2Plasma immersion methods for ion implantationENTEGRIS INC·Filed 2020·Granted Apr 4, 2023·0 cites·19 claims
- 2959US10497569B2Carbon materials for carbon implantationENTEGRIS INC·Filed 2016·Granted Dec 3, 2019·0 cites·20 claims
- 3059US2019071313A1B2f4 manufacturing processENTEGRIS INC·Filed 2018·Application pending·0 cites
- 3159US2011259366A1Ion source cleaning in semiconductor processing systemsADVANCED TECH MATERIALS·Filed 2009·Application pending·0 cites
- 3258US9991095B2Ion source cleaning in semiconductor processing systemsSWEENEY JOSEPH D·Filed 2009·Granted Jun 5, 2018·0 cites·7 claims
- 3357US10354877B2Carbon dopant gas and co-flow for implant beam and source life performance improvementENTEGRIS INC·Filed 2018·Granted Jul 16, 2019·0 cites·15 claims
- 3455US9938156B2B2F4 manufacturing processENTEGRIS INC·Filed 2012·Granted Apr 10, 2018·0 cites·8 claims
- 3555US2018119888A1Valve assemblies and fluid storage and dispensing packages comprising sameENTEGRIS INC·Filed 2016·Application pending·0 cites
- 3655US2013078790A1Carbon materials for carbon implantationADVANCED TECH MATERIALS·Filed 2012·Application pending·0 cites
- 3754US11062906B2Silicon implantation in substrates and provision of silicon precursor compositions thereforENTEGRIS INC·Filed 2014·Granted Jul 13, 2021·0 cites·7 claims
- 3854US10892137B2Ion implantation processes and apparatus using galliumENTEGRIS INC·Filed 2019·Granted Jan 12, 2021·0 cites·18 claims
- 3954US9685304B2Isotopically-enriched boron-containing compounds, and methods of making and using sameENTEGRIS INC·Filed 2015·Granted Jun 20, 2017·0 cites·16 claims
- 4054US2022349528A1Vessels and methods for storing and delivery a reagentENTEGRIS INC·Filed 2022·Application pending·0 cites
- 4153US9996090B2Preparation of high pressure BF3/H2 mixturesENTEGRIS INC·Filed 2014·Granted Jun 12, 2018·0 cites·17 claims
- 4253US2019103275A1Phosphorus or arsenic ion implantation utilizing enhanced source techniquesENTEGRIS INC·Filed 2018·Application pending·0 cites
- 4351US2011021011A1Carbon materials for carbon implantationADVANCED TECH MATERIALS·Filed 2010·Application pending·0 cites
- 4450US2015357152A1Ion implantation system and methodENTEGRIS INC·Filed 2015·Application pending·0 cites
- 4549US2017330726A1Fluorinated compositions for ion source performance improvements in nitrogen ion implantationENTEGRIS INC·Filed 2017·Application pending·0 cites
- 4648US9764298B2Apparatus and method for preparation of compounds or intermediates thereof from a solid material, and using such compounds and intermediatesENTEGRIS INC·Filed 2015·Granted Sep 19, 2017·0 cites·13 claims
- 4748US2020206717A1Adsorbents and fluid supply packages and apparatus comprising sameENTEGRIS INC·Filed 2016·Application pending·0 cites
- 4846US2023094492A1Adsorbent-type storage and delivery vessels with high purity delivery of gas, and related methodsENTEGRIS INC·Filed 2022·Application pending·0 cites
- 4946US2016172164A1Remote delivery of chemical reagentsENTEGRIS INC·Filed 2014·Application pending·0 cites
- 5045US10497532B2Ion implantation processes and apparatusENTEGRIS INC·Filed 2015·Granted Dec 3, 2019·0 cites·15 claims
Showing the top 50 of 51 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →