Inventor · disambiguated record
Regina Freed
Also filed as: FREED REGINA · FREED REGINA GERMANIE
36 granted patents·8 pending applications·44 citations·filing 2010–2023
95Inventor score
Top patents by PatentIndex Score
44 records- 0194US11621172B2Vapor phase thermal etch solutions for metal oxo photoresistsAPPLIED MATERIALS INC·Filed 2021·Granted Apr 4, 2023·2 cites·14 claims
- 0290US10424507B2Fully self-aligned viaMICROMATERIALS LLC·Filed 2017·Granted Sep 24, 2019·5 cites·13 claims
- 0389US10600688B2Methods of producing self-aligned viasMICROMATERIALS LLC·Filed 2018·Granted Mar 24, 2020·6 cites·17 claims
- 0487US10553485B2Methods of producing fully self-aligned vias and contactsMICROMATERIALS LLC·Filed 2018·Granted Feb 4, 2020·5 cites·14 claims
- 0585US11886120B2Deposition of semiconductor integration filmsAPPLIED MATERIALS INC·Filed 2021·Granted Jan 30, 2024·1 cites·20 claims
- 0685US11881402B2Self aligned multiple patterningAPPLIED MATERIALS INC·Filed 2021·Granted Jan 23, 2024·1 cites·9 claims
- 0783US11562904B2Deposition of semiconductor integration filmsAPPLIED MATERIALS INC·Filed 2020·Granted Jan 24, 2023·1 cites·6 claims
- 0882US11869807B2Fully self-aligned subtractive etchAPPLIED MATERIALS INC·Filed 2021·Granted Jan 9, 2024·1 cites·14 claims
- 0982US10790191B2Selective removal process to create high aspect ratio fully self-aligned viaMICROMATERIALS LLC·Filed 2019·Granted Sep 29, 2020·3 cites·15 claims
- 1081US12068170B2Vapor phase thermal etch solutions for metal oxo photoresistsAPPLIED MATERIALS INC·Filed 2023·Granted Aug 20, 2024·0 cites·10 claims
- 1181US10269647B2Self-aligned EPI contact flowAPPLIED MATERIALS INC·Filed 2017·Granted Apr 23, 2019·3 cites·20 claims
- 1280US10622221B2Methods of etching metal oxides with less etch residueAPPLIED MATERIALS INC·Filed 2018·Granted Apr 14, 2020·2 cites·20 claims
- 1379US11437274B2Fully self-aligned viaMICROMATERIALS LLC·Filed 2020·Granted Sep 6, 2022·1 cites·9 claims
- 1478US12033866B2Vapor phase thermal etch solutions for metal oxo photoresistsAPPLIED MATERIALS INC·Filed 2023·Granted Jul 9, 2024·0 cites·6 claims
- 1578US11437273B2Self-aligned contact and contact over active gate structuresMircomaterials LLC·Filed 2020·Granted Sep 6, 2022·2 cites·8 claims
- 1678US8089051B2Electron reflector with multiple reflective modesGRELLA LUCA·Filed 2010·Granted Jan 3, 2012·5 cites·14 claims
- 1776US10593594B2Selectively etched self-aligned via processesMICROMATERIALS LLC·Filed 2018·Granted Mar 17, 2020·2 cites·20 claims
- 1875US10892187B2Method for creating a fully self-aligned viaMICROMATERIALS LLC·Filed 2019·Granted Jan 12, 2021·2 cites·13 claims
- 1973US12300491B2Deposition of semiconductor integration filmsAPPLIED MATERIALS INC·Filed 2022·Granted May 13, 2025·0 cites·8 claims
- 2072US10777414B1Methods for reducing transfer pattern defects in a semiconductor deviceAPPLIED MATERIALS INC·Filed 2019·Granted Sep 15, 2020·1 cites·20 claims
- 2169US10699953B2Method for creating a fully self-aligned viaMICROMATERIALS LLC·Filed 2019·Granted Jun 30, 2020·1 cites·20 claims
- 2268US12416863B2Dry develop process of photoresistAPPLIED MATERIALS INC·Filed 2021·Granted Sep 16, 2025·0 cites·17 claims
- 2365US11232955B2Methods of etching metal oxides with less etch residueAPPLIED MATERIALS INC·Filed 2020·Granted Jan 25, 2022·0 cites·19 claims
- 2464US11217448B2Methods for reducing transfer pattern defects in a semiconductor deviceAPPLIED MATERIALS INC·Filed 2020·Granted Jan 4, 2022·0 cites·20 claims
- 2564US10620263B2System and method for fault isolation by emission spectra analysisFEI EFA INC·Filed 2018·Granted Apr 14, 2020·0 cites·20 claims
- 2663US11705366B2Methods for controllable metal and barrier-liner recessMICROMATERIALS LLC·Filed 2021·Granted Jul 18, 2023·0 cites·5 claims
- 2763US10522404B2Fully self-aligned viaMICROMATERIALS LLC·Filed 2019·Granted Dec 31, 2019·0 cites·6 claims
- 2863US2022359289A1Fully self-aligned viaMICROMATERIALS LLC·Filed 2022·Application pending·0 cites
- 2963US2024027916A1Fingerprinting and process control of photosensitive film deposition chamberAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 3062US10410921B2Fully self-aligned viaMICROMATERIALS LLC·Filed 2019·Granted Sep 10, 2019·0 cites·14 claims
- 3162US2023259035A1Characterization of photosensitive materialsAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 3262US2022367270A1Self-aligned contact and contact over active gate structuresMICROMATERIALS LLC·Filed 2022·Application pending·0 cites
- 3362US2020098633A1Fully self-aligned viaZHANG YING·Filed 2019·Application pending·0 cites
- 3461US11164938B2DRAM capacitor moduleMICROMATERIALS LLC·Filed 2020·Granted Nov 2, 2021·0 cites·16 claims
- 3561US2022013624A1DRAM Capacitor ModuleMICROMATERIALS LLC·Filed 2021·Application pending·0 cites
- 3660US11037825B2Selective removal process to create high aspect ratio fully self-aligned viaMICROMATERIALS LLC·Filed 2020·Granted Jun 15, 2021·0 cites·10 claims
- 3759US11133152B2Methods and apparatus for performing profile metrology on semiconductor structuresAPPLIED MATERIALS INC·Filed 2019·Granted Sep 28, 2021·0 cites·20 claims
- 3858US12084764B2Vapor phase photoresists depositionAPPLIED MATERIALS INC·Filed 2021·Granted Sep 10, 2024·0 cites·14 claims
- 3956US10041997B2System and method for fault isolation by emission spectra analysisFEI EFA INC·Filed 2015·Granted Aug 7, 2018·0 cites·21 claims
- 4054US11062942B2Methods for controllable metal and barrier-liner recessMICROMATERIALS LLC·Filed 2018·Granted Jul 13, 2021·0 cites·8 claims
- 4146US10892183B2Methods for removing metal oxidesMICROMATERIALS LLC·Filed 2019·Granted Jan 12, 2021·0 cites·16 claims
- 4244US10573555B2Methods of producing self-aligned grown viaMICROMATERIALS LLC·Filed 2018·Granted Feb 25, 2020·0 cites·16 claims
- 4344US2022198333A1Recipe optimization through machine learningAPPLIED MATERIALS INC·Filed 2021·Application pending·0 cites
- 4439US2019198392A1Methods of etching a tungsten layerAPPLIED MATERIALS INC·Filed 2017·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →