Inventor · disambiguated record
Rudy F. Garcia
Also filed as: GARCIA RUDY · GARCIA RUDY F · GARCIA RUDY FLORES
38 granted patents·2 pending applications·178 citations·filing 1996–2022
96Inventor score
Top patents by PatentIndex Score
40 records- 0195US7304302B1Systems configured to reduce distortion of a resist during a metrology process and systems and methods for reducing alteration of a specimen during analysisKLA TENCOR TECH CORP·Filed 2005·Granted Dec 4, 2007·55 cites·46 claims
- 0292US9544984B2System and method for generation of extreme ultraviolet lightKLA TENCOR CORP·Filed 2014·Granted Jan 10, 2017·10 cites·25 claims
- 0390US10021773B2Laser produced plasma light source having a target material coated on a cylindrically-symmetric elementKLA TENCOR CORP·Filed 2016·Granted Jul 10, 2018·4 cites·10 claims
- 0488US9810991B2System and method for cleaning EUV optical elementsKLA TENCOR CORP·Filed 2014·Granted Nov 7, 2017·5 cites·21 claims
- 0585US6392333B1Electron gun having magnetic collimatorAPPLIED MATERIALS INC·Filed 1999·Granted May 21, 2002·44 cites·22 claims
- 0683US7879730B2Etch selectivity enhancement in electron beam activated chemical etchKLA TENCOR TECH CORP·Filed 2007·Granted Feb 1, 2011·11 cites·19 claims
- 0778US10395884B2Ruthenium encapsulated photocathode electron emitterKLA TENCOR CORP·Filed 2018·Granted Aug 27, 2019·2 cites·20 claims
- 0878US9244368B2Particle control near reticle and optics using showerheadDELGADO GILDARDO R·Filed 2013·Granted Jan 26, 2016·3 cites·16 claims
- 0976US9389180B2Methods and apparatus for use with extreme ultraviolet light having contamination protectionKLA TENCOR CORP·Filed 2014·Granted Jul 12, 2016·2 cites·29 claims
- 1076US8765496B2Methods and systems for measuring a characteristic of a substrate or preparing a substrate for analysisNASSER-GHODSI MEHRAN·Filed 2008·Granted Jul 1, 2014·4 cites·21 claims
- 1175US9422978B2Gas bearing assembly for an EUV light sourceKLA TENCOR CORP·Filed 2014·Granted Aug 23, 2016·3 cites·23 claims
- 1274US8618513B2Apparatus and methods for forming an electrical conduction path through an insulating layerPLETTNER TOMAS·Filed 2012·Granted Dec 31, 2013·4 cites·19 claims
- 1373US10535493B2Photocathode designs and methods of generating an electron beam using a photocathodeKLA TENCOR CORP·Filed 2018·Granted Jan 14, 2020·1 cites·19 claims
- 1471US8237120B1Transverse focusing action in hyperbolic field detectorsTOTH GABOR·Filed 2009·Granted Aug 7, 2012·3 cites·13 claims
- 1570US10748737B2Electron beam generation and measurementKLA TENCOR CORP·Filed 2018·Granted Aug 18, 2020·1 cites·17 claims
- 1670US10741354B1Photocathode emitter system that generates multiple electron beamsKLA TENCOR CORP·Filed 2018·Granted Aug 11, 2020·1 cites·18 claims
- 1769US9984846B2High brightness boron-containing electron beam emitters for use in a vacuum environmentKLA TENCOR CORP·Filed 2016·Granted May 29, 2018·1 cites·20 claims
- 1868US12444643B2Method and apparatus for positioning optical isolator assembly with replaceable motor assemblyKLA CORP·Filed 2022·Granted Oct 14, 2025·0 cites·12 claims
- 1968US10880979B2Droplet generation for a laser produced plasma light sourceKLA TENCOR CORP·Filed 2016·Granted Dec 29, 2020·1 cites·14 claims
- 2067US11419202B2Laser produced plasma light source having a target material coated on a cylindrically-symmetric elementKLA CORP·Filed 2021·Granted Aug 16, 2022·0 cites·18 claims
- 2167US11343899B2Droplet generation for a laser produced plasma light sourceKLA CORP·Filed 2020·Granted May 24, 2022·0 cites·19 claims
- 2267US7755042B1Auger electron spectrometer with applied magnetic field at target surfaceKLA TENCOR CORP·Filed 2008·Granted Jul 13, 2010·2 cites·11 claims
- 2365US10953441B2System and method for cleaning optical surfaces of an extreme ultraviolet optical systemKLA TENCOR CORP·Filed 2013·Granted Mar 23, 2021·1 cites·18 claims
- 2465US5900667AOperating a solid state particle detector within a magnetic deflection field so as to minimize eddy currentsETEC SYSTEMS INC·Filed 1996·Granted May 4, 1999·17 cites·8 claims
- 2562US8052885B2Structural modification using electron beam activated chemical etchKLA TENCOR CORP·Filed 2007·Granted Nov 8, 2011·2 cites·18 claims
- 2661US10804069B2Photocathode designs and methods of generating an electron beam using a photocathodeKLA TENCOR CORP·Filed 2019·Granted Oct 13, 2020·0 cites·20 claims
- 2760US2014291516A1Methods and Systems for Measuring a Characteristic of a Substrate or Preparing a Substrate for AnalysisKLA TENCOR TECH CORP·Filed 2014·Application pending·0 cites
- 2859US11156926B2Vacuum actuator containment for molecular contaminant and particle mitigationKLA CORP·Filed 2020·Granted Oct 26, 2021·0 cites·20 claims
- 2959US10893599B2Laser produced plasma light source having a target material coated on a cylindrically-symmetric elementKLA TENCOR CORP·Filed 2018·Granted Jan 12, 2021·0 cites·9 claims
- 3058US10714294B2Metal protective layer for electron emitters with a diffusion barrierKLA TENCOR CORP·Filed 2019·Granted Jul 14, 2020·0 cites·16 claims
- 3154US10714307B2Neutral atom imaging systemKLA TENCOR CORP·Filed 2018·Granted Jul 14, 2020·0 cites·23 claims
- 3254US7612348B1Transverse magnetic field voltage isolatorKLA TECHNOLOGIES CORP·Filed 2008·Granted Nov 3, 2009·0 cites·13 claims
- 3353US10714295B2Metal encapsulated photocathode electron emitterKLA TENCOR CORP·Filed 2019·Granted Jul 14, 2020·0 cites·19 claims
- 3453US10141155B2Electron beam emitters with ruthenium coatingKLA TENCOR CORP·Filed 2017·Granted Nov 27, 2018·0 cites·20 claims
- 3552US12158576B2Counterflow gas nozzle for contamination mitigation in extreme ultraviolet inspection systemsKLA CORP·Filed 2021·Granted Dec 3, 2024·0 cites·20 claims
- 3652US10607806B2Silicon electron emitter designsKLA TENCOR CORP·Filed 2018·Granted Mar 31, 2020·0 cites·16 claims
- 3748US10840055B2System and method for photocathode illumination inspectionKLA TENCOR CORP·Filed 2019·Granted Nov 17, 2020·0 cites·33 claims
- 3848US7394339B1Transverse magnetic field voltage isolatorKLA TENCOR TECH CORP·Filed 2004·Granted Jul 1, 2008·1 cites·21 claims
- 3945US9874512B2Method and system for gas flow mitigation of molecular contamination of opticsKLA TENCOR CORP·Filed 2014·Granted Jan 23, 2018·0 cites·16 claims
- 4038US2014166051A1Apparatus, system, and method for separating gases and mitigating debris in a controlled pressure environmentKLA TENCOR CORP·Filed 2013·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →