Inventor · disambiguated record
Shankar Swaminathan
Also filed as: SWAMINATHAN SHANKAR
85 granted patents·17 pending applications·3,955 citations·filing 2011–2025
99Inventor score
Top patents by PatentIndex Score
102 records- 0199US9997357B2Capped ALD films for doping fin-shaped channel regions of 3-D IC transistorsLAM RES CORP·Filed 2014·Granted Jun 12, 2018·430 cites·22 claims
- 0299US9786570B2Methods for depositing films on sensitive substratesNOVELLUS SYSTEMS INC·Filed 2016·Granted Oct 10, 2017·362 cites·6 claims
- 0399US9390909B2Soft landing nanolaminates for advanced patterningNOVELLUS SYSTEMS INC·Filed 2014·Granted Jul 12, 2016·500 cites·18 claims
- 0498US10074543B2High dry etch rate materials for semiconductor patterning applicationsLAM RES CORP·Filed 2016·Granted Sep 11, 2018·33 cites·26 claims
- 0598US10043657B2Plasma assisted atomic layer deposition metal oxide for patterning applicationsLAM RES CORP·Filed 2017·Granted Aug 7, 2018·23 cites·19 claims
- 0698US10043655B2Plasma activated conformal dielectric film depositionNOVELLUS SYSTEMS INC·Filed 2017·Granted Aug 7, 2018·28 cites·20 claims
- 0798US10008428B2Methods for depositing films on sensitive substratesNOVELLUS SYSTEMS INC·Filed 2017·Granted Jun 26, 2018·27 cites·13 claims
- 0898US9892917B2Plasma assisted atomic layer deposition of multi-layer films for patterning applicationsLAM RES CORP·Filed 2016·Granted Feb 13, 2018·55 cites·18 claims
- 0998US9793110B2Gapfill of variable aspect ratio features with a composite PEALD and PECVD methodLAM RES CORP·Filed 2016·Granted Oct 17, 2017·25 cites·16 claims
- 1098US9673041B2Plasma assisted atomic layer deposition titanium oxide for patterning applicationsLAM RES CORP·Filed 2016·Granted Jun 6, 2017·26 cites·20 claims
- 1198US9570290B2Plasma assisted atomic layer deposition titanium oxide for conformal encapsulation and gapfill applicationsLAM RES CORP·Filed 2016·Granted Feb 14, 2017·29 cites·19 claims
- 1298US9570274B2Plasma activated conformal dielectric film depositionNOVELLUS SYSTEMS INC·Filed 2015·Granted Feb 14, 2017·30 cites·11 claims
- 1398US9508547B1Composition-matched curtain gas mixtures for edge uniformity modulation in large-volume ALD reactorsLAM RES CORP·Filed 2015·Granted Nov 29, 2016·31 cites·20 claims
- 1498US9373500B2Plasma assisted atomic layer deposition titanium oxide for conformal encapsulation and gapfill applicationsLAM RES CORP·Filed 2014·Granted Jun 21, 2016·41 cites·22 claims
- 1598US9355839B2Sub-saturated atomic layer deposition and conformal film depositionLAM RES CORP·Filed 2013·Granted May 31, 2016·55 cites·22 claims
- 1698US9287113B2Methods for depositing films on sensitive substratesNOVELLUS SYSTEMS INC·Filed 2013·Granted Mar 15, 2016·74 cites·19 claims
- 1798US9257274B2Gapfill of variable aspect ratio features with a composite PEALD and PECVD methodLAM RES CORP·Filed 2013·Granted Feb 9, 2016·523 cites·23 claims
- 1898US8956983B2Conformal doping via plasma activated atomic layer deposition and conformal film depositionSWAMINATHAN SHANKAR·Filed 2012·Granted Feb 17, 2015·588 cites·41 claims
- 1997US12203166B2Apparatus and methods for performing an in-situ etch of reaction chambers with fluorine-based radicalsASM IP HOLDING BV·Filed 2021·Granted Jan 21, 2025·3 cites·16 claims
- 2097US11581220B2Methods for depositing a molybdenum metal film over a dielectric surface of a substrate by a cyclical deposition process and related semiconductor device structuresASM IP HOLDING BV·Filed 2021·Granted Feb 14, 2023·4 cites·20 claims
- 2197US10559468B2Capped ALD films for doping fin-shaped channel regions of 3-D IC transistorsLAM RES CORP·Filed 2018·Granted Feb 11, 2020·13 cites·21 claims
- 2297US10361076B2Gapfill of variable aspect ratio features with a composite PEALD and PECVD methodLAM RES CORP·Filed 2017·Granted Jul 23, 2019·17 cites·4 claims
- 2397US9355886B2Conformal film deposition for gapfillNOVELLUS SYSTEMS INC·Filed 2013·Granted May 31, 2016·53 cites·14 claims
- 2497US9214334B2High growth rate process for conformal aluminum nitrideLAM RES CORP·Filed 2014·Granted Dec 15, 2015·38 cites·15 claims
- 2597US8999859B2Plasma activated conformal dielectric film depositionNOVELLUS SYSTEMS INC·Filed 2013·Granted Apr 7, 2015·56 cites·25 claims
- 2697US8728956B2Plasma activated conformal film depositionLAVOIE ADRIEN·Filed 2011·Granted May 20, 2014·541 cites·39 claims
- 2797US8637411B2Plasma activated conformal dielectric film depositionSWAMINATHAN SHANKAR·Filed 2011·Granted Jan 28, 2014·99 cites·44 claims
- 2896US12354877B2Vapor deposition of films comprising molybdenumASM IP HOLDING BV·Filed 2021·Granted Jul 8, 2025·4 cites·24 claims
- 2996US11295980B2Methods for depositing a molybdenum metal film over a dielectric surface of a substrate by a cyclical deposition process and related semiconductor device structuresASM IP HOLDING BV·Filed 2018·Granted Apr 5, 2022·14 cites·17 claims
- 3096US11286558B2Methods for depositing a molybdenum nitride film on a surface of a substrate by a cyclical deposition process and related semiconductor device structures including a molybdenum nitride filmASM IP HOLDING BV·Filed 2020·Granted Mar 29, 2022·9 cites·38 claims
- 3196US10741458B2Methods for depositing films on sensitive substratesNOVELLUS SYSTEMS INC·Filed 2018·Granted Aug 11, 2020·9 cites·16 claims
- 3296US10665429B2Systems and methods for suppressing parasitic plasma and reducing within-wafer non-uniformityLAM RES CORP·Filed 2017·Granted May 26, 2020·6 cites·20 claims
- 3396US9793096B2Systems and methods for suppressing parasitic plasma and reducing within-wafer non-uniformityLAM RES CORP·Filed 2015·Granted Oct 17, 2017·16 cites·18 claims
- 3496US9698042B1Wafer centering in pocket to improve azimuthal thickness uniformity at wafer edgeLAM RES CORP·Filed 2016·Granted Jul 4, 2017·23 cites·19 claims
- 3596US9230800B2Plasma activated conformal film depositionNOVELLUS SYSTEMS INC·Filed 2014·Granted Jan 5, 2016·41 cites·22 claims
- 3695US11901175B2Method for selective deposition of silicon nitride layer and structure including selectively-deposited silicon nitride layerASM IP HOLDING BV·Filed 2022·Granted Feb 13, 2024·2 cites·18 claims
- 3795US10378107B2Low volume showerhead with faceplate holes for improved flow uniformityLAM RES CORP·Filed 2015·Granted Aug 13, 2019·11 cites·26 claims
- 3895US10134579B2Method for high modulus ALD SiO2 spacerLAM RES CORP·Filed 2016·Granted Nov 20, 2018·13 cites·16 claims
- 3994US11133180B2Gapfill of variable aspect ratio features with a composite PEALD and PECVD methodLAM RES CORP·Filed 2019·Granted Sep 28, 2021·6 cites·14 claims
- 4094US11072860B2Fill on demand ampoule refillLAM RES CORP·Filed 2015·Granted Jul 27, 2021·6 cites·14 claims
- 4193US10629435B2Doped ALD films for semiconductor patterning applicationsLAM RES CORP·Filed 2016·Granted Apr 21, 2020·9 cites·17 claims
- 4293US10157755B2Purge and pumping structures arranged beneath substrate plane to reduce defectsLAM RES CORP·Filed 2015·Granted Dec 18, 2018·4 cites·17 claims
- 4392US10403474B2Collar, conical showerheads and/or top plates for reducing recirculation in a substrate processing systemLAM RES CORP·Filed 2016·Granted Sep 3, 2019·10 cites·10 claims
- 4491US11946136B2Semiconductor processing deviceASM IP HOLDING BV·Filed 2020·Granted Apr 2, 2024·2 cites·20 claims
- 4591US10407773B2Methods and apparatuses for showerhead backside parasitic plasma suppression in a secondary purge enabled ALD systemLAM RES CORP·Filed 2017·Granted Sep 10, 2019·6 cites·17 claims
- 4691US9905423B2Soft landing nanolaminates for advanced patterningNOVELLUS SYSTEMS INC·Filed 2016·Granted Feb 27, 2018·5 cites·14 claims
- 4791US9617638B2Methods and apparatuses for showerhead backside parasitic plasma suppression in a secondary purge enabled ALD systemLAM RES CORP·Filed 2014·Granted Apr 11, 2017·9 cites·24 claims
- 4890US12261038B2Gapfill of variable aspect ratio features with a composite PEALD and PECVD methodLAM RES CORP·Filed 2021·Granted Mar 25, 2025·1 cites·20 claims
- 4990US10741365B2Low volume showerhead with porous baffleLAM RES CORP·Filed 2015·Granted Aug 11, 2020·7 cites·20 claims
- 5089US11959175B2Fill on demand ampoule refillLAM RES CORP·Filed 2021·Granted Apr 16, 2024·1 cites·19 claims
Showing the top 50 of 102 patent records by PatentIndex Score.
Join the waitlist — get patent alerts
Get an alert when Shankar Swaminathan files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →