US9806058B2ActiveUtilityA1

Chip package having die structures of different heights and method of forming same

99
Assignee: TAIWAN SEMICONDUCTOR MFG CO LTDPriority: Jul 2, 2015Filed: Jan 21, 2016Granted: Oct 31, 2017
Est. expiryJul 2, 2035(~9 yrs left)· nominal 20-yr term from priority
H10W 99/00H10W 90/794H10W 90/734H10W 90/732H10W 90/724H10W 90/722H10W 90/701H10W 90/401H10W 90/297H10W 74/142H10W 74/117H10W 74/019H10W 74/15H10W 74/00H10W 72/9413H10W 72/07254H10W 72/07236H10W 72/944H10W 72/874H10W 72/252H10W 72/247H10W 72/241H10W 72/222H10W 72/0198H10W 72/29H10W 70/095H10W 72/90H10W 72/019H10W 70/635H10W 70/611H10W 74/141H10W 74/131H10W 74/47H10W 74/473H10W 74/01H10W 90/00H10W 74/10H01L 2224/73259H01L 2224/06181H01L 25/18H01L 24/03H01L 24/09H01L 2924/1436H01L 24/96H01L 2924/1437H01L 2224/16235H01L 2924/182H01L 2225/06517H01L 2224/04105H01L 23/5384H01L 2224/12105H01L 2924/15311H01L 2225/06513H01L 21/568H01L 2224/32225H01L 2224/73204H01L 2924/18161H01L 2224/08235H01L 2225/06541H01L 25/0652H01L 25/50H01L 2224/17181H01L 23/3128H01L 2224/16227H10W 72/072H10W 74/127H10W 72/20
99
PatentIndex Score
60
Cited by
18
References
20
Claims

Abstract

Structures and formation methods of a chip package are provided. The chip package includes a chip stack including a number of semiconductor dies. The chip package also includes a semiconductor chip, and the semiconductor chip is higher than the chip stack. The chip package further includes a package layer covering a top and sidewalls of the chip stack and sidewalls of the semiconductor chip.

Claims

exact text as granted — not AI-modified
What is claimed is: 
     
       1. A chip package, comprising:
 a chip stack including a plurality of semiconductor dies; 
 a semiconductor chip, wherein the semiconductor chip is higher than the chip stack; and 
 a package layer overfilling a gap between the chip stack and the semiconductor chip, the package layer covering a top and sidewalls of the chip stack and sidewalls of the semiconductor chip. 
 
     
     
       2. The chip package as claimed in  claim 1 , wherein a top surface of the semiconductor chip is not covered by the package layer. 
     
     
       3. The chip package as claimed in  claim 1 , further comprising a substrate, wherein the chip stack and the semiconductor chip are bonded on the substrate through conductive bonding structures. 
     
     
       4. The chip package as claimed in  claim 3 , wherein the substrate is a semiconductor substrate. 
     
     
       5. The chip package as claimed in  claim 4 , further comprising a conductive feature penetrating through the substrate and electrically connected to one of the conductive bonding structures. 
     
     
       6. The chip package as claimed in  claim 3 , wherein the package layer surrounds and is in direct contact with the conductive bonding structures. 
     
     
       7. The chip package as claimed in  claim 3 , further comprising an underfill layer surrounding and in direct contact with the conductive bonding structures, wherein the underfill layer is between the substrate and the package layer. 
     
     
       8. The chip package as claimed in  claim 7 , wherein the underfill layer is in direct contact with the package layer. 
     
     
       9. The chip package as claimed in  claim 1 , wherein the chip stack comprises a plurality of memory dies. 
     
     
       10. The chip package as claimed in  claim 1 , wherein a top surface of the package layer is substantially coplanar with a top surface of the semiconductor chip. 
     
     
       11. The chip package as claimed in  claim 1 , wherein the chip stack comprises a molding compound layer surrounding the plurality of semiconductor dies. 
     
     
       12. A chip package, comprising:
 a first semiconductor chip; 
 a second semiconductor chip; and 
 a molding compound layer surrounding the first semiconductor chip and the second semiconductor chip, wherein the molding compound layer covers a top surface of the first semiconductor chip, and a top surface of the molding compound layer is substantially coplanar with a top surface of the second semiconductor chip. 
 
     
     
       13. The chip package as claimed in  claim 12 , wherein the second semiconductor chip is higher than the first semiconductor chip. 
     
     
       14. The chip package as claimed in  claim 12 , further comprising a substrate, wherein the first semiconductor chip and the second semiconductor chip are bonded on the substrate through conductive bonding structures. 
     
     
       15. The chip package as claimed in  claim 14 , further comprising a conductive feature penetrating through the substrate and electrically connected to one of the conductive bonding structures. 
     
     
       16. The chip package as claimed in  claim 14 , wherein the molding compound layer surrounds and is in direct contact with the conductive bonding structures. 
     
     
       17. A method for forming a chip package, comprising:
 bonding a first semiconductor chip and a second semiconductor chip over a substrate; 
 forming a package layer over the substrate to encapsulate the first semiconductor chip and the second semiconductor chip; and 
 planarizing the package layer so that a top surface of the second semiconductor chip is exposed, and a top surface of the first semiconductor chip is covered by the package layer. 
 
     
     
       18. The method for forming a chip package as claimed in  claim 17 , wherein the first semiconductor chip is not ground during the planarization process. 
     
     
       19. The method for forming a chip package as claimed in  claim 17 , wherein the first semiconductor chip and the second semiconductor chip are bonded onto the substrate through a plurality of conductive bonding structures. 
     
     
       20. The method for forming a chip package as claimed in  claim 19 , further comprising forming an underfill layer to surround the conductive bonding structures before the formation of the package layer.

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