Inventor

MILLER KEITH A

US89 patents

⚠️ This page may combine multiple inventors who share the name “MILLER KEITH A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MILLER KEITH A

APPLIED MATERIALS INC

Target profile for a physical vapor deposition chamber target

Process shield for a substrate processing chamber

Process shield for a substrate processing chamber

Deposition ring for a substrate processing chamber

Target profile for a physical vapor deposition chamber target

Notched deposition ring

Support ring assembly

Shields usable with an inductively coupled plasma reactor

Sidewall magnet improving uniformity of inductively coupled plasma and shields used therewith

Selectable dual position magnetron

Reducing particle generation during sputter deposition

Deposition ring and electrostatic chuck for physical vapor deposition chamber

Wafer processing deposition shielding components

Coaxial shafts for radial positioning of rotating magnetron

Magnetron having continuously variable radial position

Method and apparatus for measuring pressure in a physical vapor deposition chamber

Encapsulated and water cooled electromagnet array

Cleaning of sin with CCP plasma or RPS clean

Collimator for a physical vapor deposition (PVD) chamber

Collimator for a physical vapor deposition chamber

Methods and apparatus for controlling ion fraction in physical vapor deposition processes

Isolator ring clamp and physical vapor deposition chamber incorporating same

Methods and apparatus for controlling ion fraction in physical vapor deposition processes

Electrostatic chuck design for high temperature RF applications

High temperature detachable very high frequency (VHF) electrostatic chuck (ESC) for PVD chamber

Substrate processing chamber having improved process volume sealing

Physical vapor deposition (PVD) plasma energy control per dynamic magnetron control

Physical vapor deposition (PVD) target having low friction pads

PVD target for self-centering process shield

Apparatus for gas injection in a physical vapor deposition chamber

PVD plasma control using a magnet edge lift mechanism

Broadband supply circuitry for a plasma processing system

PREFORMED LINE PRODUCTS CO

Optical fiber splice case

Convertible fiber closure platform

Fiber optic cable closure and assembly

Fiber retention sleeve

Convertible fiber closure platform

AIR PROD & CHEM

Safety pressure regulator

Cryogenic embrittlement freezer with gas lock

Burner

RIKER MARTIN LEE

Wafer processing deposition shielding components

Wafer processing deposition shielding components

ROY SHAMBHU N

Electrostatic chuck and methods of use thereof

RASHEED MUHAMMAD

Deposition ring and electrostatic chuck for physical vapor deposition chamber

MILLER KEITH A

Mechanism for continuously varying radial position of a magnetron

YE MENGQI

Sputtering of thermally resistive materials including metal chalcogenides

LINCOLN COMPOSITES INC

Tank frame

BOITNOTT CHRISTOPHER

Offset magnet compensation for non-uniform plasma

SINGH RAM BAHADUR

Wear pin gap closure detection system for gas turbine engine

MEHTA VINEET

Substrate cleaning chamber and cleaning and conditioning methods