Inventor · disambiguated record
Ryuichi Matsuda
Also filed as: MATSUDA RYUICHI
19 granted patents·19 pending applications·75 citations·filing 1989–2018
92Inventor score
Top patents by PatentIndex Score
38 records- 0196US7977243B2Barrier metal film production apparatus, barrier metal film production method, metal film production method, and metal film production apparatusCANON ANELVA CORP·Filed 2010·Granted Jul 12, 2011·37 cites·7 claims
- 0283US7588799B2Metal film production apparatusCANON ANELVA CORP·Filed 2005·Granted Sep 15, 2009·4 cites·5 claims
- 0381US10616989B2Plasma generation apparatus including measurement device and plasma thrusterMITSUBISHI HEAVY IND LTD·Filed 2015·Granted Apr 7, 2020·3 cites·9 claims
- 0474US8908720B2Directed-energy irradiating apparatusMITSUBISHI HEAVY IND LTD·Filed 2013·Granted Dec 9, 2014·5 cites·19 claims
- 0572US9011634B2Plasma processing apparatus and plasma processing methodMITSUBISHI HEAVY IND LTD·Filed 2012·Granted Apr 21, 2015·2 cites·5 claims
- 0669US8662010B2Plasma processing apparatus, plasma processing method, plasma film deposition apparatus, and plasma film deposition methodMATSUDA RYUICHI·Filed 2007·Granted Mar 4, 2014·2 cites·6 claims
- 0769US8480912B2Plasma processing apparatus and plasma processing methodMATSUDA RYUICHI·Filed 2007·Granted Jul 9, 2013·2 cites·3 claims
- 0868US2009324848A1Metal film production apparatusCANON ANELVA CORP·Filed 2009·Application pending·0 cites
- 0966US10164397B2Laser oscillation deviceMITSUBISHI HEAVY IND LTD·Filed 2015·Granted Dec 25, 2018·1 cites·18 claims
- 1065US7659209B2Barrier metal film production methodCANON ANELVA CORP·Filed 2007·Granted Feb 9, 2010·2 cites·2 claims
- 1165US7335315B2Method and device for measuring wafer potential or temperatureMITSUBISHI HEAVY IND LTD·Filed 2003·Granted Feb 26, 2008·10 cites·3 claims
- 1264US10292252B2Input coupler for accelerating cavity and acceleratorMITSUBISHI HEAVY IND MACH SYSTEMS LTD·Filed 2017·Granted May 14, 2019·1 cites·5 claims
- 1359US2010047471A1Barrier metal film production apparatus, barrier metal film production method, metal film production method, and metal film production apparatusCANON ANELVA CORP·Filed 2009·Application pending·0 cites
- 1455US7520246B2Power supply antenna and power supply methodMITSUBISHI HEAVY IND LTD·Filed 2005·Granted Apr 21, 2009·2 cites·8 claims
- 1553US7283346B2Electrostatic chuck and its manufacturing methodMITSUBISHI HEAVY IND LTD·Filed 2002·Granted Oct 16, 2007·4 cites·7 claims
- 1653US2007117363A1Barrier metal film production apparatus, barrier metal film production method, metal film production method, and metal film production apparatusSAKAMOTO HITOSHI·Filed 2006·Application pending·0 cites
- 1753US2007141274A1Barrier metal film production apparatus, barrier metal film production method, metal film production method, and metal film production apparatusSAKAMOTO HITOSHI·Filed 2006·Application pending·0 cites
- 1853US2007087577A1Barrier metal film production apparatus, barrier metal film production method, metal film production method, and metal film production apparatusSAKAMOTO HITOSHI·Filed 2006·Application pending·0 cites
- 1951US2006054593A1Barrier metal film production apparatus, barrier metal film production method, metal film production method, and metal film production apparatusSAKAMOTO HITOSHI·Filed 2005·Application pending·0 cites
- 2049US9263848B2Directed-energy irradiating apparatusMITSUBISHI HEAVY IND LTD·Filed 2013·Granted Feb 16, 2016·0 cites·17 claims
- 2148US2011104363A1Plasma processing apparatus and method for controlling substrate attraction force in plasma processing apparatusMITSUBISHI HEAVY IND LTD·Filed 2009·Application pending·0 cites
- 2246US2005202183A1Plasma processing system, plasma processing method, plasma film deposition system, and plasma film deposition methodMITSUBISHI HEAVY IND LTD·Filed 2003·Application pending·0 cites
- 2345US11322903B2Solid state laser apparatusMITSUBISHI HEAVY IND LTD·Filed 2018·Granted May 3, 2022·0 cites·16 claims
- 2445US11017245B2Parking assist apparatusAISIN SEIKI·Filed 2018·Granted May 25, 2021·0 cites·5 claims
- 2545US2010236482A1Plasma film forming apparatusMITSUBISHI HEAVY IND LTD·Filed 2008·Application pending·0 cites
- 2644US2015014123A1Production system and method for manufacturing processed productYASKAWA DENKI SEISAKUSHO KK·Filed 2014·Application pending·0 cites
- 2743US2012132619A1Gas exhaust structure, and apparatus and method for plasma processingMATSUDA RYUICHI·Filed 2010·Application pending·0 cites
- 2843US2003089315A1Metal film production apparatusFiled 2002·Application pending·0 cites
- 2942US2008115728A1Plasma Processing ApparatusMITSUBISHI HEAVY IND LTD·Filed 2006·Application pending·0 cites
- 3041US2003091739A1Barrier metal film production apparatus, barrier metal film production method, metal film production method, and metal film production apparatusFiled 2002·Application pending·0 cites
- 3140US8960124B2Plasma processing apparatus and plasma processing methodMATSUDA RYUICHI·Filed 2010·Granted Feb 24, 2015·0 cites·1 claims
- 3239US2011297321A1Substrate support stage of plasma processing apparatusMATSUDA RYUICHI·Filed 2009·Application pending·0 cites
- 3338US11063403B2Solid-state laser deviceMITSUBISHI HEAVY IND LTD·Filed 2017·Granted Jul 13, 2021·0 cites·4 claims
- 3437US2013088146A1Inductively coupled plasma generation deviceMATSUDA RYUICHI·Filed 2011·Application pending·0 cites
- 3535US2002018025A1Power supply antenna and power supply methodMITSUBISHI HEAVY IND LTD·Filed 2001·Application pending·0 cites
- 3633US2012111502A1Structure of substrate supporting table, and plasma processing apparatusMATSUDA RYUICHI·Filed 2010·Application pending·0 cites
- 3733US2012135164A1Plasma processing apparatus and plasma processing methodMATSUDA RYUICHI·Filed 2010·Application pending·0 cites
- 3829US4985401AMethod for producing a superconductor of an immiscible alloy and its oxideAISIN SEIKI·Filed 1989·Granted Jan 15, 1991·0 cites·19 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →