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US11264342B2ActiveUtilityPatentIndex 73

Package on package structure and method for forming the same

Assignee: TAIWAN SEMICONDUCTOR MFG CO LTDPriority: Apr 16, 2012Filed: Jan 3, 2020Granted: Mar 1, 2022
Est. expiryApr 16, 2032(~5.8 yrs left)· nominal 20-yr term from priority
Inventors:YU CHEN-HUALIU CHUNG-SHICHENG MING-DALII MIRNG-JICHEN MENG-TSELIN WEI-HUNG
H10W 90/754H10W 90/724H10W 90/722H10W 90/297H10W 90/28H10W 90/26H10W 80/743H10W 74/00H10W 72/9415H10W 72/07254H10W 72/07253H10W 72/07252H10W 72/07236H10W 72/01251H10W 72/952H10W 72/944H10W 72/923H10W 72/255H10W 72/252H10W 72/248H10W 72/245H10W 72/244H10W 72/242H10W 72/237H10W 72/235H10W 72/232H10W 72/227H10W 72/223H10W 72/221H10W 72/0198H10W 72/29H10W 90/701H10W 90/00H10W 74/134H10W 74/121H10W 74/014H10W 70/60H10W 74/142H10W 74/15H10W 90/732H10W 90/734B23K 35/001B23K 35/22B23K 35/3613B23K 35/0222B23K 35/262H01L 24/81H01L 2924/00014H01L 2225/1058H01L 2224/13144H01L 2224/13022H01L 2224/05022H01L 24/94H01L 2924/13091H01L 2924/01083H01L 2224/05124H01L 2224/08113H01L 23/498H01L 2924/381H01L 2224/16104H01L 24/16H01L 2225/06568H01L 2924/1306H01L 2224/05166H01L 2224/13184H01L 2224/81815H01L 2224/48227H01L 2224/05155H01L 2224/06181H01L 2224/13005H01L 23/3178H01L 2225/1023H01L 2224/13023H01L 2924/206H01L 2224/13139H01L 21/561H01L 2924/181H01L 2224/13026H01L 2224/81H01L 2924/00012H01L 2224/05139H01L 24/05H01L 2224/16227H01L 2924/3841H01L 2224/13147H01L 2224/05144H01L 2224/97H01L 2924/013H01L 2224/1412H01L 2224/05572H01L 2224/1357H01L 24/08H01L 2224/48091H01L 24/17H01L 2224/94H01L 2224/16225H01L 2224/13582H01L 2924/01029H01L 2224/13155H01L 2224/1703H01L 2224/1355H01L 2224/13014H01L 2924/1305H01L 24/13H01L 2224/05184H01L 23/3135H01L 2225/0651H01L 2924/12042H01L 2224/0401H01L 2225/06513H01L 2225/06541H01L 2924/15311H01L 2224/05147H01L 25/50H01L 2224/14181H01L 2224/16145H01L 25/03H01L 2224/136H01L 2224/05611H01L 23/49816H01L 2224/05552H01L 2224/17051H01L 2924/00H01L 25/0652H01L 2224/1184H01L 2225/06565H01L 24/97H01L 2924/01047H01L 2224/13666H01L 25/105H01L 2224/13561H01L 2224/13124H01L 2924/014H01L 24/14
73
PatentIndex Score
2
Cited by
49
References
20
Claims

Abstract

Some embodiments relate to a semiconductor device package, which includes a substrate with a contact pad. A non-solder ball is coupled to the contact pad at a contact pad interface surface. A layer of solder is disposed over an outer surface of the non-solder ball, and has an inner surface and an outer surface which are generally concentric with the outer surface of the non-solder ball. An intermediate layer separates the non-solder ball and the layer of solder. The intermediate layer is distinct in composition from both the non-solder ball and the layer of solder. Sidewalls of the layer of solder are curved or sphere-like and terminate at a planar surface, which is disposed at a maximum height of the layer of solder as measured from the contact pad interface surface.

Claims

exact text as granted — not AI-modified
What is claimed is: 
     
       1. A semiconductor device comprising a solder ball, comprising:
 a copper pad; 
 a copper ball disposed over an upper surface of the copper pad; 
 a layer of solder over an outer surface of the copper ball, the layer of solder having different annular thicknesses at different locations over the outer surface of the copper ball; and 
 an intermediate layer comprising nickel separating the copper ball and the layer of solder, wherein the intermediate layer has different annular thicknesses varying between 0.5 micrometers and 2 micrometers at different locations of the intermediate layer. 
 
     
     
       2. The semiconductor device of  claim 1 , wherein the different annular thicknesses vary between 0.8 micrometers and 1.4 micrometers at different locations of the intermediate layer. 
     
     
       3. The semiconductor device of  claim 1 , wherein the copper ball has a maximum width ranging between 200 micrometers and 250 micrometers. 
     
     
       4. The semiconductor device of  claim 1 , wherein the layer of solder comprises Sn or a solder alloy. 
     
     
       5. The semiconductor device of  claim 1 , further comprising:
 a package including a first semiconductor die; 
 a substrate, wherein the layer of solder has a first maximum width and attaches a lower surface of the package to an upper surface of the substrate; 
 a second semiconductor die arranged between the upper surface of the substrate and the lower surface of the package, and arranged to a side of the solder ball, 
 a bonding structure connecting the second semiconductor die to the substrate, wherein the bonding structure has a second maximum width that is less than the first maximum width. 
 
     
     
       6. The semiconductor device of  claim 5 , further comprising:
 a molding underfill layer disposed between the upper surface of the substrate and the lower surface of the package, and separating an upper surface of the second semiconductor die from the lower surface of the package. 
 
     
     
       7. A semiconductor device, comprising:
 a copper pad; 
 a copper core disposed over the copper pad; 
 an intermediate layer comprising nickel surrounding the copper core; and 
 a layer of solder comprising tin and disposed over an outer surface of the copper core, wherein the intermediate layer separates the layer of solder from the copper core and wherein the intermediate layer has different annular thicknesses at different locations of the intermediate layer. 
 
     
     
       8. The semiconductor device of  claim 7 , further comprising: a bonding layer coupling the copper core to the copper pad. 
     
     
       9. The semiconductor device of  claim 7 , wherein the different annular thicknesses vary between 0.8 micrometers and 1.4 micrometers at different locations of the intermediate layer. 
     
     
       10. The semiconductor device of  claim 7 , wherein the copper core has a maximum width ranging between 200 micrometers and 250 micrometers. 
     
     
       11. The semiconductor device of  claim 7 , wherein the layer of solder comprises Sn or a solder alloy. 
     
     
       12. The semiconductor device of  claim 7 , further comprising:
 a package including a first semiconductor die; 
 a substrate, wherein the layer of solder has a first maximum width and attaches a lower surface of the package to an upper surface of the substrate; 
 a second semiconductor die arranged between the upper surface of the substrate and the lower surface of the package, and arranged next to an outermost surface of the layer of solder; 
 a bonding structure connecting the second semiconductor die to the substrate, wherein the bonding structure has a second maximum width that is less than the first maximum width. 
 
     
     
       13. The semiconductor device of  claim 12 , further comprising:
 a molding underfill layer disposed between the upper surface of the substrate and the lower surface of the package, and separating an upper surface of the second semiconductor die from the lower surface of the package. 
 
     
     
       14. A semiconductor device, comprising:
 a substrate; 
 a package including a first semiconductor die disposed over an upper surface of the substrate; 
 a second semiconductor die arranged between the upper surface of the substrate and a lower surface of the package, 
 a solder ball coupling the upper surface of the substrate to the lower surface of the package, wherein the second semiconductor die is arranged to a side of the solder ball; 
 a bonding structure connecting the second semiconductor die to the substrate; 
 the solder ball comprising:
 a copper core; 
 a layer of solder over an outer surface of the copper core, wherein the layer of solder attaches the lower surface of the package to the upper surface of the substrate; and 
 an intermediate layer separating the copper core and the layer of solder; 
 wherein the layer of solder has a first annular thickness on a first portion of the intermediate layer and has a second annular thickness on a second portion of the intermediate layer, the second annular thickness being greater than the first annular thickness. 
 
 
     
     
       15. The semiconductor device of  claim 14 , wherein the copper core, the intermediate layer, and the layer of solder each have a center region that lies along a common axis which extends perpendicularly though the upper surface of the substrate. 
     
     
       16. The semiconductor device of  claim 15 , wherein the intermediate layer has different annular thicknesses varying between 0.5 micrometers and 2 micrometers at different locations of the intermediate layer. 
     
     
       17. The semiconductor device of  claim 16 , wherein the different annular thicknesses vary between 0.8 micrometers and 1.4 micrometers at the different locations of the intermediate layer. 
     
     
       18. The semiconductor device of  claim 14 , wherein the copper core has a maximum width ranging between 200 micrometers and 250 micrometers. 
     
     
       19. The semiconductor device of  claim 14 , further comprising:
 a bonding layer coupling the copper core to a contact pad. 
 
     
     
       20. The semiconductor device of  claim 14 , wherein the intermediate layer has different annular thicknesses varying between 0.5 micrometers and 2 micrometers at different locations of the intermediate layer.

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