Inventor
YASUDA HOZUMI
JP82 patents
⚠️ This page may combine multiple inventors who share the name “YASUDA HOZUMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
43 patentsUSD793976SAug 8, 2017
Substrate retaining ring
EBARA CORP434 citations99
USD634719SMar 22, 2011
Elastic membrane for semiconductor wafer polishing apparatus
EBARA CORP539 citations99
USD633452SMar 1, 2011
Elastic membrane for semiconductor wafer polishing apparatus
EBARA CORP342 citations99
USD769200SOct 18, 2016
Elastic membrane for semiconductor wafer polishing apparatus
EBARA CORP48 citations98
US6852019B2Feb 8, 2005
Substrate holding apparatus
EBARA CORP49 citations96
US6435949B1Aug 20, 2002
Workpiece polishing apparatus comprising a fluid pressure bag provided between a pressing surface and the workpiece and method of use thereof
EBARA CORP71 citations96
US6077385AJun 20, 2000
Polishing apparatus
EBARA CORP59 citations96
US6019868AFeb 1, 2000
Polishing apparatus
EBARA CORP57 citations96
US5679063AOct 21, 1997
Polishing apparatus
EBARA CORP81 citations96
US5651724AJul 29, 1997
Method and apparatus for polishing workpiece
EBARA CORP66 citations95
USD808349SJan 23, 2018
Elastic membrane for semiconductor wafer polishing apparatus
EBARA CORP18 citations94
USD766849SSep 20, 2016
Substrate retaining ring
EBARA CORP25 citations94
US10040166B2Aug 7, 2018
Polishing apparatus
EBARA CORP11 citations93
US6443821B1Sep 3, 2002
Workpiece carrier and polishing apparatus having workpiece carrier
EBARA CORP45 citations93
US7083507B2Aug 1, 2006
Substrate holding apparatus
EBARA CORP14 citations92
US6890402B2May 10, 2005
Substrate holding apparatus and substrate polishing apparatus
EBARA CORP26 citations92
US6416384B1Jul 9, 2002
Method and apparatus for polishing
EBARA CORP32 citations92
US10442056B2Oct 15, 2019
Substrate holding apparatus and polishing apparatus
EBARA CORP16 citations86
US10702972B2Jul 7, 2020
Polishing apparatus
EBARA CORP7 citations84
US10293455B2May 21, 2019
Polishing apparatus
EBARA CORP5 citations84
USD799437SOct 10, 2017
Substrate retaining ring
EBARA CORP16 citations84
USD794585SAug 15, 2017
Retainer ring for substrate
EBARA CORP12 citations84
US9662764B2May 30, 2017
Substrate holder, polishing apparatus, and polishing method
EBARA CORP7 citations84
USD770990SNov 8, 2016
Elastic membrane for semiconductor wafer polishing apparatus
EBARA CORP6 citations84
US9403255B2Aug 2, 2016
Polishing apparatus and polishing method
EBARA CORP14 citations84
USD729753SMay 19, 2015
Elastic membrane for semiconductor wafer polishing
EBARA CORP7 citations84
US8859070B2Oct 14, 2014
Elastic membrane
EBARA CORP16 citations84
US7491117B2Feb 17, 2009
Substrate holding apparatus
EBARA CORP11 citations84
US6432258B1Aug 13, 2002
Apparatus for and method of polishing workpiece
EBARA CORP15 citations84
US7208076B2Apr 24, 2007
Substrate processing apparatus and method
EBARA CORP10 citations83
US7101465B2Sep 5, 2006
Electrolytic processing device and substrate processing apparatus
EBARA CORP14 citations83
US7967665B2Jun 28, 2011
Substrate holding apparatus, polishing apparatus, and polishing method
EBARA CORP5 citations74
US6428403B1Aug 6, 2002
Polishing apparatus
EBARA CORP11 citations74
US6033520AMar 7, 2000
Apparatus for and method of polishing workpiece
EBARA CORP10 citations74
US11911872B2Feb 27, 2024
Substrate processing apparatus and substrate processing method
EBARA CORP2 citations73
US11735457B2Aug 22, 2023
Substrate processing apparatus and substrate processing method
EBARA CORP2 citations73
US11511389B2Nov 29, 2022
Polishing head and polishing apparatus
EBARA CORP3 citations73
US10092992B2Oct 9, 2018
Polishing apparatus, polishing head, and retainer ring
EBARA CORP3 citations73
USD813180SMar 20, 2018
Elastic membrane for semiconductor wafer polishing apparatus
EBARA CORP2 citations73
US9884401B2Feb 6, 2018
Elastic membrane and substrate holding apparatus
EBARA CORP2 citations73
US9815171B2Nov 14, 2017
Substrate holder, polishing apparatus, polishing method, and retaining ring
EBARA CORP2 citations73
US9399277B2Jul 26, 2016
Polishing apparatus and polishing method
EBARA CORP3 citations73
US8357029B2Jan 22, 2013
Polishing apparatus
EBARA CORP5 citations73
YASUDA HOZUMI
3 patentsUS8485866B2Jul 16, 2013
Substrate holding apparatus, polishing apparatus, and polishing method
YASUDA HOZUMI8 citations83
US8070560B2Dec 6, 2011
Polishing apparatus and method
YASUDA HOZUMI13 citations83
US8267746B2Sep 18, 2012
Substrate holding apparatus, polishing apparatus, and polishing method
YASUDA HOZUMI5 citations73
FUKUSHIMA MAKOTO
2 patentsTOSHIBA KK
1 patentNABEYA OSAMU
1 patentShowing the top 50 of 82 patents by PatentIndex Score.