Inventor

KOSUGI TETSUYA

JP39 patents

⚠️ This page may combine multiple inventors who share the name “KOSUGI TETSUYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KOSUGI TETSUYA

HITACHI INT ELECTRIC INC

Ceiling heater for substrate processing apparatus

Air flow controller for heater of substrate processing apparatus

Heater of substrate processing apparatus

Heater for substrate processing apparatus

Substrate processing apparatus, method of manufacturing semiconductor device and method of processing substrate

Substrate processing apparatus, heating apparatus, ceiling heat insulator, and method of manufacturing semiconductor device

Heater of substrate processing apparatus

Thermometry tool for substrate processing apparatus

Insulation structure and method of manufacturing semiconductor device

Protector tube for thermocouple

Protector tube for thermocouple

Substrate processing apparatus including heating and cooling device, and ceiling part included in the same

Substrate processing apparatus, and thermocouple

Method of manufacturing semiconductor device using meander-shaped heating element

Substrate processing apparatus, method of manufacturing semiconductor device, and thermocouple support

Temperature detecting apparatus, substrate processing apparatus and method of manufacturing semiconductor device

Substrate processing apparatus, and thermocouple

KOKUSAI ELECTRIC CORP

Retainer of ceiling heater for semiconductor fabrication apparatus

Ceiling heater for substrate processing apparatus

Ceiling heater for substrate processing apparatus

Cooling unit, heat insulating structure, and substrate processing apparatus

Electric furnace for substrate processing apparatus

Electric furnace for substrate processing apparatus

Substrate processing apparatus, and thermocouple

Temperature sensor

Retainer plate of top heater for wafer processing furnace

Retainer plate of top heater for wafer processing furnace

Substrate processing apparatus, and thermocouple

Substrate processing apparatus and ceiling heater

Substrate processing apparatus, method of manufacturing semiconductor device, and thermocouple support

Substrate processing apparatus, method of manufacturing semiconductor device and heater

Heater, temperature control system, and processing apparatus

Substrate processing apparatus, substrate processing method, semiconductor device manufacturing method, and control program

MURATA HITOSHI

Substrate processing apparatus and heating equipment

Heating device having a meander-shaped heating element with an insulating body accomodating the same, and the substrate processing apparatus including the same

Substrate processing apparatus, method of manufacturing semiconductor device, and ceiling insulating part

Heating device, substrate processing apparatus, and method of manufacturing semiconductor device

KOSUGI TETSUYA

Temperature detecting apparatus, substrate processing apparatus and method of manufacturing semiconductor device

Heater supporting device