Inventor
TOGASHI SHINGO
JP43 patents
Patents
43 patentsUSD793976SAug 8, 2017
Substrate retaining ring
EBARA CORP434 citations99
USD634719SMar 22, 2011
Elastic membrane for semiconductor wafer polishing apparatus
EBARA CORP539 citations99
USD633452SMar 1, 2011
Elastic membrane for semiconductor wafer polishing apparatus
EBARA CORP342 citations99
USD769200SOct 18, 2016
Elastic membrane for semiconductor wafer polishing apparatus
EBARA CORP48 citations98
USD808349SJan 23, 2018
Elastic membrane for semiconductor wafer polishing apparatus
EBARA CORP18 citations94
USD766849SSep 20, 2016
Substrate retaining ring
EBARA CORP25 citations94
USD839224SJan 29, 2019
Elastic membrane for semiconductor wafer polishing
EBARA CORP28 citations93
US10702972B2Jul 7, 2020
Polishing apparatus
EBARA CORP7 citations84
USD859332SSep 10, 2019
Elastic membrane for semiconductor wafer polishing
EBARA CORP10 citations84
USD799437SOct 10, 2017
Substrate retaining ring
EBARA CORP16 citations84
USD794585SAug 15, 2017
Retainer ring for substrate
EBARA CORP12 citations84
US9662764B2May 30, 2017
Substrate holder, polishing apparatus, and polishing method
EBARA CORP7 citations84
USD770990SNov 8, 2016
Elastic membrane for semiconductor wafer polishing apparatus
EBARA CORP6 citations84
US9403255B2Aug 2, 2016
Polishing apparatus and polishing method
EBARA CORP14 citations84
US8859070B2Oct 14, 2014
Elastic membrane
EBARA CORP16 citations84
USD913977SMar 23, 2021
Elastic membrane for semiconductor wafer polishing
EBARA CORP5 citations83
USD989012SJun 13, 2023
Elastic membrane
EBARA CORP4 citations74
US12183642B2Dec 31, 2024
Film-thickness measuring method, method of detecting notch portion, and polishing apparatus
EBARA CORP2 citations73
US11548113B2Jan 10, 2023
Method and apparatus for polishing a substrate
EBARA CORP2 citations73
US11472001B2Oct 18, 2022
Elastic membrane and substrate holding apparatus
EBARA CORP2 citations73
US11088011B2Aug 10, 2021
Elastic membrane, substrate holding device, and polishing apparatus
EBARA CORP2 citations73
USD813180SMar 20, 2018
Elastic membrane for semiconductor wafer polishing apparatus
EBARA CORP2 citations73
US9884401B2Feb 6, 2018
Elastic membrane and substrate holding apparatus
EBARA CORP2 citations73
US9815171B2Nov 14, 2017
Substrate holder, polishing apparatus, polishing method, and retaining ring
EBARA CORP2 citations73
US11179823B2Nov 23, 2021
Substrate holding apparatus, elastic membrane, polishing apparatus, and method for replacing elastic membrane
EBARA CORP3 citations72
US10464185B2Nov 5, 2019
Substrate polishing method, top ring, and substrate polishing apparatus
EBARA CORP2 citations72
US10391603B2Aug 27, 2019
Polishing apparatus, control method and recording medium
EBARA CORP4 citations72
US12128523B2Oct 29, 2024
Polishing apparatus
EBARA CORP0 citations63
US11478895B2Oct 25, 2022
Substrate holding device, substrate polishing apparatus, and method of manufacturing the substrate holding device
EBARA CORP0 citations63
US10486284B2Nov 26, 2019
Substrate holding device, and substrate polishing apparatus
EBARA CORP1 citations63
US12068189B2Aug 20, 2024
Elastic membrane, substrate holding device, and polishing apparatus
EBARA CORP0 citations62
US11958163B2Apr 16, 2024
Substrate holding apparatus, elastic membrane, polishing apparatus, and method for replacing elastic membrane
EBARA CORP1 citations62
USD1021832SApr 9, 2024
Elastic membrane
EBARA CORP0 citations62
USD918161SMay 4, 2021
Elastic membrane
EBARA CORP1 citations62
US10307882B2Jun 4, 2019
Method and apparatus for polishing a substrate
EBARA CORP1 citations62
US12358096B2Jul 15, 2025
Rubber membrane having first and second hardness for use in a polishing head
EBARA CORP0 citations52
US11745306B2Sep 5, 2023
Polishing apparatus and method of controlling inclination of stationary ring
EBARA CORP0 citations52
US11731235B2Aug 22, 2023
Polishing apparatus and polishing method
EBARA CORP0 citations52
US11654524B2May 23, 2023
Method of detecting abnormality of a roller which transmits a local load to a retainer ring, and polishing apparatus
EBARA CORP0 citations52
US10213896B2Feb 26, 2019
Elastic membrane, substrate holding apparatus, and polishing apparatus
EBARA CORP0 citations51
US9999956B2Jun 19, 2018
Polishing device and polishing method
EBARA CORP0 citations51
US10414015B2Sep 17, 2019
Polishing apparatus and polishing method
EBARA CORP0 citations42
US9676076B2Jun 13, 2017
Polishing method and polishing apparatus
EBARA CORP0 citations42