Inventor
YAMAGUCHI TAKATOMO
JP32 patents
⚠️ This page may combine multiple inventors who share the name “YAMAGUCHI TAKATOMO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI INT ELECTRIC INC
19 patentsUS8882923B2Nov 11, 2014
Substrate processing apparatus and method of manufacturing semiconductor device
HITACHI INT ELECTRIC INC466 citations99
USD826185SAug 21, 2018
Ceiling heater for substrate processing apparatus
HITACHI INT ELECTRIC INC24 citations94
USD822081SJul 3, 2018
Rotary tool for boat of semiconductor manufacturing apparatus
HITACHI INT ELECTRIC INC19 citations94
USD803908SNov 28, 2017
Rotary tool for boat of semiconductor manufacturing apparatus
HITACHI INT ELECTRIC INC25 citations94
USD739832SSep 29, 2015
Reaction tube
HITACHI INT ELECTRIC INC34 citations94
US6737613B2May 18, 2004
Heat treatment apparatus and method for processing substrates
HITACHI INT ELECTRIC INC21 citations92
USD825501SAug 14, 2018
Air flow controller for heater of substrate processing apparatus
HITACHI INT ELECTRIC INC6 citations84
USD818960SMay 29, 2018
Insulation unit of semiconductor manufacturing apparatus
HITACHI INT ELECTRIC INC6 citations84
USD818961SMay 29, 2018
Insulation unit cover of semiconductor manufacturing apparatus
HITACHI INT ELECTRIC INC6 citations84
US7455734B2Nov 25, 2008
Substrate processing apparatus, substrate holder, and manufacturing method of semiconductor device
HITACHI INT ELECTRIC INC13 citations83
US11222796B2Jan 11, 2022
Substrate processing apparatus
HITACHI INT ELECTRIC INC1 citations73
USD825502SAug 14, 2018
Heater for substrate processing apparatus
HITACHI INT ELECTRIC INC2 citations73
US9502237B2Nov 22, 2016
Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium
HITACHI INT ELECTRIC INC5 citations73
US10615061B2Apr 7, 2020
Substrate processing apparatus
HITACHI INT ELECTRIC INC1 citations62
US10597780B2Mar 24, 2020
Substrate processing apparatus, heater and method of manufacturing semiconductor device
HITACHI INT ELECTRIC INC0 citations52
USD795209SAug 22, 2017
Heater for semiconductor thermal process
HITACHI INT ELECTRIC INC1 citations52
USD793974SAug 8, 2017
Heater for semiconductor thermal process
HITACHI INT ELECTRIC INC0 citations52
US9982347B2May 29, 2018
Cleaning method, method of manufacturing semiconductor device and substrate processing apparatus
HITACHI INT ELECTRIC INC1 citations51
US9530677B2Dec 27, 2016
Substrate processing apparatus and semiconductor device manufacturing method
HITACHI INT ELECTRIC INC0 citations42
KOKUSAI ELECTRIC CORP
10 patentsUSD918848SMay 11, 2021
Retainer of ceiling heater for semiconductor fabrication apparatus
KOKUSAI ELECTRIC CORP12 citations85
US11495477B2Nov 8, 2022
Substrate processing apparatus
KOKUSAI ELECTRIC CORP2 citations73
USD962184SAug 30, 2022
Retainer plate of top heater for wafer processing furnace
KOKUSAI ELECTRIC CORP5 citations72
USD962183SAug 30, 2022
Retainer plate of top heater for wafer processing furnace
KOKUSAI ELECTRIC CORP5 citations72
USD1053156SDec 3, 2024
Furnace for substrate processing apparatus
KOKUSAI ELECTRIC CORP2 citations70
US11990359B2May 21, 2024
Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium
KOKUSAI ELECTRIC CORP0 citations62
US11359285B2Jun 14, 2022
Substrate processing apparatus, heater and method of manufacturing semiconductor device
KOKUSAI ELECTRIC CORP0 citations62
US12540388B2Feb 3, 2026
Method of cleaning member in process container, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
KOKUSAI ELECTRIC CORP0 citations61
USD1070797SApr 15, 2025
Furnace for substrate processing apparatus
KOKUSAI ELECTRIC CORP1 citations61
US12053805B2Aug 6, 2024
Method of cleaning member in process container, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
KOKUSAI ELECTRIC CORP0 citations61