Inventor
NAMIKI KEISUKE
JP48 patents
⚠️ This page may combine multiple inventors who share the name “NAMIKI KEISUKE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
46 patentsUSD793976SAug 8, 2017
Substrate retaining ring
EBARA CORP434 citations99
USD634719SMar 22, 2011
Elastic membrane for semiconductor wafer polishing apparatus
EBARA CORP539 citations99
USD633452SMar 1, 2011
Elastic membrane for semiconductor wafer polishing apparatus
EBARA CORP342 citations99
USD769200SOct 18, 2016
Elastic membrane for semiconductor wafer polishing apparatus
EBARA CORP48 citations98
US6852019B2Feb 8, 2005
Substrate holding apparatus
EBARA CORP49 citations96
US5651724AJul 29, 1997
Method and apparatus for polishing workpiece
EBARA CORP66 citations95
USD808349SJan 23, 2018
Elastic membrane for semiconductor wafer polishing apparatus
EBARA CORP18 citations94
USD766849SSep 20, 2016
Substrate retaining ring
EBARA CORP25 citations94
USD839224SJan 29, 2019
Elastic membrane for semiconductor wafer polishing
EBARA CORP28 citations93
US7083507B2Aug 1, 2006
Substrate holding apparatus
EBARA CORP14 citations92
US6890402B2May 10, 2005
Substrate holding apparatus and substrate polishing apparatus
EBARA CORP26 citations92
US10442056B2Oct 15, 2019
Substrate holding apparatus and polishing apparatus
EBARA CORP16 citations86
US10702972B2Jul 7, 2020
Polishing apparatus
EBARA CORP7 citations84
USD859332SSep 10, 2019
Elastic membrane for semiconductor wafer polishing
EBARA CORP10 citations84
USD799437SOct 10, 2017
Substrate retaining ring
EBARA CORP16 citations84
USD794585SAug 15, 2017
Retainer ring for substrate
EBARA CORP12 citations84
US9662764B2May 30, 2017
Substrate holder, polishing apparatus, and polishing method
EBARA CORP7 citations84
USD770990SNov 8, 2016
Elastic membrane for semiconductor wafer polishing apparatus
EBARA CORP6 citations84
US9403255B2Aug 2, 2016
Polishing apparatus and polishing method
EBARA CORP14 citations84
USD729753SMay 19, 2015
Elastic membrane for semiconductor wafer polishing
EBARA CORP7 citations84
US8859070B2Oct 14, 2014
Elastic membrane
EBARA CORP16 citations84
US7491117B2Feb 17, 2009
Substrate holding apparatus
EBARA CORP11 citations84
USD913977SMar 23, 2021
Elastic membrane for semiconductor wafer polishing
EBARA CORP5 citations83
US12183642B2Dec 31, 2024
Film-thickness measuring method, method of detecting notch portion, and polishing apparatus
EBARA CORP2 citations73
US11088011B2Aug 10, 2021
Elastic membrane, substrate holding device, and polishing apparatus
EBARA CORP2 citations73
USD813180SMar 20, 2018
Elastic membrane for semiconductor wafer polishing apparatus
EBARA CORP2 citations73
US9815171B2Nov 14, 2017
Substrate holder, polishing apparatus, polishing method, and retaining ring
EBARA CORP2 citations73
US7850509B2Dec 14, 2010
Substrate holding apparatus
EBARA CORP5 citations73
US7156725B2Jan 2, 2007
Substrate polishing machine
EBARA CORP7 citations73
US11179823B2Nov 23, 2021
Substrate holding apparatus, elastic membrane, polishing apparatus, and method for replacing elastic membrane
EBARA CORP3 citations72
US10464185B2Nov 5, 2019
Substrate polishing method, top ring, and substrate polishing apparatus
EBARA CORP2 citations72
US10391603B2Aug 27, 2019
Polishing apparatus, control method and recording medium
EBARA CORP4 citations72
US12128523B2Oct 29, 2024
Polishing apparatus
EBARA CORP0 citations63
US12068189B2Aug 20, 2024
Elastic membrane, substrate holding device, and polishing apparatus
EBARA CORP0 citations62
US11958163B2Apr 16, 2024
Substrate holding apparatus, elastic membrane, polishing apparatus, and method for replacing elastic membrane
EBARA CORP1 citations62
USD918161SMay 4, 2021
Elastic membrane
EBARA CORP1 citations62
US7897007B2Mar 1, 2011
Substrate holding apparatus and substrate polishing apparatus
EBARA CORP3 citations62
US7901550B2Mar 8, 2011
Plating apparatus
EBARA CORP5 citations61
US12381089B2Aug 5, 2025
Information processing system, information processing method, program, and substrate processing apparatus
EBARA CORP0 citations52
US11969858B2Apr 30, 2024
Substrate processing apparatus
EBARA CORP0 citations52
US11745306B2Sep 5, 2023
Polishing apparatus and method of controlling inclination of stationary ring
EBARA CORP0 citations52
US11731235B2Aug 22, 2023
Polishing apparatus and polishing method
EBARA CORP0 citations52
US9573241B2Feb 21, 2017
Polishing apparatus and polishing method
EBARA CORP0 citations52
US10213896B2Feb 26, 2019
Elastic membrane, substrate holding apparatus, and polishing apparatus
EBARA CORP0 citations51
US9999956B2Jun 19, 2018
Polishing device and polishing method
EBARA CORP0 citations51
US9676076B2Jun 13, 2017
Polishing method and polishing apparatus
EBARA CORP0 citations42