Topic leaderboard
Manufacture of microstructural devices
Ranked by the PatentIndex Score — a 1–99 percentile within B81C · public-visibility date · generated 2026
top 25 per window · public-visibility date
Rising· last 2 yrs
Inventors whose newest B81C patents became public in the last 2 years — the current frontier
- 199Sidlgata V. Sreenivasan23 patents · 1,514 citations
- 296Steven S. Nasiri16 patents · 962 citations
- 392Rajesh Katkar25 patents · 807 citations
- 488Keith G. Fife52 patents · 1,045 citations
- 583Jonathan M. Rothberg43 patents · 1,008 citations
- 679Andreas Bibl33 patents · 1,141 citations
- 775Markus Lutz62 patents · 1,103 citations
- 871Aaron Partridge61 patents · 930 citations
- 967Cyprian Emeka Uzoh15 patents · 405 citations
- 1063Dariusz Golda28 patents · 742 citations
- 1158Michael Julian Daneman40 patents · 372 citations
- 1254Pavan Gupta21 patents · 142 citations
- 1350Charles I. Grosjean23 patents · 214 citations
- 1446Michael A. Huff12 patents · 332 citations
- 1542Eugene M. Chow24 patents · 200 citations
- 1638Paolo Ferrari17 patents · 261 citations
- 1733Horst Theuss47 patents · 308 citations
- 1829Colin Robert Jenkins19 patents · 101 citations
- 1925Jungsang Kim7 patents · 390 citations
- 2021Gurtej S. Sandhu20 patents · 113 citations
- 2117Renata Melamud Berger8 patents · 84 citations
- 2213Aaron A. Geisberger19 patents · 172 citations
- 238Paul M. Hagelin21 patents · 66 citations
- 244Stefan Barzen27 patents · 128 citations
- 251Robert S. Okojie7 patents · 152 citations
Active· last 5 yrs
Sustained B81C output across the last 5 years
- 199John A. Rogers40 patents · 8,231 citations
- 296Etienne Menard37 patents · 7,307 citations
- 392Dahl-Young Khang21 patents · 5,316 citations
- 488Matthew Meitl33 patents · 5,404 citations
- 583Ralph G. Nuzzo28 patents · 5,101 citations
- 679Yugang Sun20 patents · 4,484 citations
- 775Keon Jae Lee14 patents · 3,402 citations
- 871Zhengtao Zhu13 patents · 3,178 citations
- 967Heung Cho Ko15 patents · 2,597 citations
- 1063Alfred J. Baca12 patents · 1,641 citations
- 1158Jongseung Yoon12 patents · 1,641 citations
- 1254Olav Solgaard7 patents · 2,111 citations
- 1350Michael Motala10 patents · 1,287 citations
- 1446Donald E. Ingber9 patents · 1,104 citations
- 1542Sidlgata V. Sreenivasan23 patents · 1,514 citations
- 1638Mark L. Adams10 patents · 959 citations
- 1733Byung-Jin Choi11 patents · 1,151 citations
- 1829Anthony K. Stamper100 patents · 720 citations
- 1925Mark Stoykovich15 patents · 1,194 citations
- 2021Steven S. Nasiri16 patents · 962 citations
- 2117Rajesh Katkar25 patents · 807 citations
- 2213Chang-Jae Yu9 patents · 1,063 citations
- 238Jong-Hyun Ahn9 patents · 1,063 citations
- 244Keith G. Fife52 patents · 1,045 citations
- 251Jonathan M. Rothberg43 patents · 1,008 citations
All-time canon
Career PatentIndex Score in B81C
- 199John A. Rogers40 patents · 8,231 citations
- 296Francois J. Henley40 patents · 5,493 citations
- 392Nathan W. Cheung37 patents · 5,403 citations
- 488Etienne Menard37 patents · 7,307 citations
- 583Dahl-Young Khang21 patents · 5,316 citations
- 679Matthew Meitl33 patents · 5,404 citations
- 775Ralph G. Nuzzo28 patents · 5,101 citations
- 871Yugang Sun20 patents · 4,484 citations
- 967Keon Jae Lee14 patents · 3,402 citations
- 1063Zhengtao Zhu13 patents · 3,178 citations
- 1158George M. Whitesides23 patents · 4,647 citations
- 1254Stephen R. Quake28 patents · 3,361 citations
- 1350Todd A. Thorsen23 patents · 3,163 citations
- 1446Axel Scherer39 patents · 3,159 citations
- 1542Hou-Pu Chou22 patents · 2,977 citations
- 1638Marc A. Unger21 patents · 2,974 citations
- 1733Grover Owens11 patents · 4,114 citations
- 1829Vadim Vladimirovich Yuzhakov9 patents · 3,866 citations
- 1925Faiz Feisal Sherman11 patents · 3,851 citations
- 2021Vladimir Gartstein9 patents · 3,717 citations
- 2117Heung Cho Ko15 patents · 2,597 citations
- 2213Alfred J. Baca12 patents · 1,641 citations
- 238Jongseung Yoon12 patents · 1,641 citations
- 244David M. Bloom8 patents · 2,402 citations
- 251Calvin Y. H. Chow6 patents · 1,667 citations
Rising· last 2 yrs
The top-scoring B81C patents made public in the last 2 years
- 199US12326604B2✦ AIIntegrated circuit packages having electrical and optical connectivity and methods of maki2 cites · 202467% earned
- 296US12391546B1✦ AIMethod of making acoustic devices with directional reinforcement4 cites · 202575% earned
- 392US12482686B2✦ AIOffset alignment and repair in micro device transfer2 cites · 202458% earned
- 488US12410053B1Embedded digital sensor structure1 cites · 202556% earned
- 583US11926524B1Methods, apparatus, and systems for fabricating solution-based conductive 2D and 3D electr2 cites · 202467% earned
- 679US12163229B2Multi zone spot heating in EPI1 cites · 202446% earned
- 775US12122667B2Sensor devices with gas-permeable cover and associated production methods1 cites · 202456% earned
- 871US11965797B1Bipolar transistor type MEMS pressure sensor and preparation method thereof1 cites · 202467% earned
- 967US11993011B1Plasma micronozzle adapter1 cites · 202467% earned
- 1063US12569880B2CMOS ultrasonic transducers and related apparatus and methods0 cites · 20240% earned
- 1158US12365582B2MEMS resonator integrated cicruit fabrication0 cites · 20250% earned
- 1254US12374547B1Methods of forming nanostructures utilizing self-assembled nucleic acids0 cites · 20250% earned
- 1350US12445107B2Non-lid-bonded MEMS resonator with phosphorus dopant0 cites · 20240% earned
- 1446US12308275B2Heterogeneous integration of components onto compact devices using moiré based metrology a0 cites · 20240% earned
- 1542USRE49987EMultiple plated via arrays of different wire heights on a same substrate0 cites · 20240% earned
- 1638US12492120B2MEMS resonator0 cites · 20250% earned
- 1733US12508587B2Multilayer fluidic devices and methods for their fabrication0 cites · 20240% earned
- 1829US12285780B2Capacitive micromachined ultrasonic transducer with contoured electrode0 cites · 20240% earned
- 1925US12443281B2Wearable glove with a plurality of fluidic actuators and a plurality of fluidic control de0 cites · 20240% earned
- 2021US12351452B1MEMS with small-molecule barricade0 cites · 20250% earned
- 2117US12504839B2Electronic device0 cites · 20240% earned
- 2213US12263506B2Anti-stiction bottom cavity surface for micromachined ultrasonic transducer devices0 cites · 20240% earned
- 238US12189114B2Optical device production method0 cites · 20240% earned
- 244US12534358B2Semiconductor device structure with movable membrane0 cites · 20240% earned
- 251US12280370B2Covalently modified surfaces, kits, and methods of preparation and use0 cites · 20240% earned
Active· last 5 yrs
The top-scoring B81C patents of the last 5 years
- 199US11385108B2✦ AISealed force sensor with etch stop layer20 cites · 202181% earned
- 296US10999684B1✦ AIMEMS microphone and method of manufacturing the MEMS microphone15 cites · 202189% earned
- 392US11366430B2✦ AIVapor cells having one or more optical windows bonded to a dielectric body11 cites · 202182% earned
- 488US10944041B1Hybrid ultrasonic transducer and method of forming the same12 cites · 202182% earned
- 583US11054453B2Photonic-crystal vapor cells for imaging of electromagnetic fields10 cites · 202181% earned
- 679US11163230B2Imprint lithography stamp method of making and using the same13 cites · 202183% earned
- 775US12048558B2System for determining fluid level in a biological subject10 cites · 202181% earned
- 871US11087989B1Cryogenic atomic layer etch with noble gases8 cites · 202176% earned
- 967US12070307B2Electrically functional polymer microneedle array8 cites · 202180% earned
- 1063US11066296B1Methods, apparatus, and systems for fabricating solution-based conductive 2D and 3D electr9 cites · 202181% earned
- 1158US11553280B2Piezoelectric MEMS diaphragm microphone7 cites · 202175% earned
- 1254US11670615B2Bonded structures6 cites · 202167% earned
- 1350US11818540B1Acoustic devices with edge corrugation4 cites · 202370% earned
- 1446US12391546B1Method of making acoustic devices with directional reinforcement4 cites · 202575% earned
- 1542US11335607B2Apparatus and methods for wafer to wafer bonding6 cites · 202285% earned
- 1638US11703356B1Online trimming device and method for micro-shell resonator gyroscope3 cites · 202380% earned
- 1733US12032216B2Integrated circuit packages having electrical and optical connectivity and methods of maki6 cites · 202178% earned
- 1829US11361971B2High aspect ratio Bosch deep etch5 cites · 202272% earned
- 1925US11564312B2Laser light source co-packaged with photonic integrated circuit and substrate5 cites · 202284% earned
- 2021US11370656B2Stacked-die MEMS resonator4 cites · 202154% earned
- 2117US11260424B2Contoured electrode for capacitive micromachined ultrasonic transducer4 cites · 202164% earned
- 2213US11312617B2Mems device built using the BEOL metal layers of a solid state semiconductor process4 cites · 202167% earned
- 238US12006205B2Micro-device structures with etch holes4 cites · 202270% earned
- 244US11618673B2Transfer system for microelements4 cites · 202275% earned
- 251US11703331B2Three dimensional microstructures with selectively removed regions for use in gyroscopes a4 cites · 202275% earned
All-time canon
The defining B81C patents of the whole record
- 199US5512131A✦ AIFormation of microstamped patterns on surfaces and derivative articles1,825 cites · 199696% earned
- 296US6334856B1✦ AIMicroneedle devices and methods of manufacture and use thereof1,581 cites · 200290% earned
- 392US5501893A✦ AIMethod of anisotropically etching silicon1,052 cites · 199695% earned
- 488US7622367B1Methods and devices for fabricating and assembling printable semiconductor elements977 cites · 200985% earned
- 583US5376252AMicrofluidic structure and process for its manufacture948 cites · 199495% earned
- 679US6503231B1Microneedle device for transport of molecules across tissue921 cites · 200389% earned
- 775US6408878B2Microfabricated elastomeric valve and pump systems910 cites · 200184% earned
- 871US6256533B1Apparatus and method for using an intracutaneous microneedle array893 cites · 200191% earned
- 967US5311360AMethod and apparatus for modulating a light beam872 cites · 199491% earned
- 1063US7557367B2Stretchable semiconductor elements and stretchable electrical circuits832 cites · 200684% earned
- 1158US6355198B1Method of forming articles including waveguides via capillary micromolding and microtransf831 cites · 200287% earned
- 1254US6794119B2Method for fabricating a structure for a microelectromechanical systems (MEMS) device746 cites · 200391% earned
- 1350US6379324B1Intracutaneous microneedle array apparatus731 cites · 200292% earned
- 1446US6589625B1Hermetic seal and method to create the same727 cites · 200392% earned
- 1542US5589136ASilicon-based sleeve devices for chemical reactions714 cites · 199695% earned
- 1638US5808797AMethod and apparatus for modulating a light beam663 cites · 199892% earned
- 1733US6167910B1Multi-layer microfluidic devices629 cites · 200189% earned
- 1829US7972875B2Optical systems fabricated by printing-based assembly596 cites · 201085% earned
- 1925US6027630AMethod for electrochemical fabrication581 cites · 200082% earned
- 2021US6342427B1Method for forming micro cavity566 cites · 200295% earned
- 2117US7521292B2Stretchable form of single crystal silicon for high performance electronics on rubber subs561 cites · 200686% earned
- 2213US6312612B1Apparatus and method for manufacturing an intracutaneous microneedle array554 cites · 200190% earned
- 238US6074725AFabrication of microfluidic circuits by printing techniques534 cites · 200092% earned
- 244US7115305B2Method of producing regular arrays of nano-scale objects using nano-structured block-copol529 cites · 200392% earned
- 251US7195733B2Composite patterning devices for soft lithography514 cites · 200595% earned
Rising· last 2 yrs
Assignees whose newest B81C patents became public in the last 2 years — the current frontier
- 199TEXAS INSTRUMENTS INC220 patents · 5,196 citations
- 296UNIV LELAND STANFORD JUNIOR24 patents · 2,549 citations
- 392UNIV CALIFORNIA82 patents · 4,941 citations
- 488BOSCH GMBH ROBERT399 patents · 4,333 citations
- 583KNOWLES ELECTRONICS LLC70 patents · 1,019 citations
- 679INVENSENSE INC161 patents · 1,276 citations
- 775CANON KK81 patents · 1,485 citations
- 871COMMISSARIAT ENERGIE ATOMIQUE151 patents · 1,192 citations
- 967CORNING INC24 patents · 610 citations
- 1063XEROX CORP33 patents · 793 citations
- 1158APPLIED MATERIALS INC46 patents · 659 citations
- 1254MICRON TECHNOLOGY INC60 patents · 542 citations
- 1350TAIWAN SEMICONDUCTOR MFG CO LTD441 patents · 1,133 citations
- 1446ST MICROELECTRONICS SRL211 patents · 996 citations
- 1542PALO ALTO RES CT INC39 patents · 411 citations
- 1638UNIV TEXAS27 patents · 319 citations
- 1733MURATA MANUFACTURING CO58 patents · 337 citations
- 1829SITIME CORP41 patents · 169 citations
- 1925INFINEON TECHNOLOGIES AG280 patents · 1,176 citations
- 2021X CELEPRINT LTD18 patents · 319 citations
- 2117ADVANCED SEMICONDUCTOR ENG50 patents · 298 citations
- 2213UNIV DUKE10 patents · 329 citations
- 238NEXTINPUT INC10 patents · 146 citations
- 244ST MICROELECTRONICS INC27 patents · 126 citations
- 251SCHOTT AG18 patents · 126 citations
Active· last 5 yrs
Sustained B81C output across the last 5 years
- 199UNIV ILLINOIS44 patents · 6,469 citations
- 296HARVARD COLLEGE36 patents · 5,234 citations
- 392TEXAS INSTRUMENTS INC220 patents · 5,196 citations
- 488UNIV LELAND STANFORD JUNIOR24 patents · 2,549 citations
- 583UNIV CALIFORNIA82 patents · 4,941 citations
- 679BOSCH GMBH ROBERT399 patents · 4,333 citations
- 775KNOWLES ELECTRONICS LLC70 patents · 1,019 citations
- 871ANALOG DEVICES INC116 patents · 4,223 citations
- 967MASSACHUSETTS INST TECHNOLOGY29 patents · 1,242 citations
- 1063INVENSENSE INC161 patents · 1,276 citations
- 1158CANON KK81 patents · 1,485 citations
- 1254WISCONSIN ALUMNI RES FOUND24 patents · 907 citations
- 1350IBM270 patents · 2,613 citations
- 1446DENSO CORP75 patents · 1,765 citations
- 1542COMMISSARIAT ENERGIE ATOMIQUE151 patents · 1,192 citations
- 1638INTEL CORP77 patents · 1,126 citations
- 1733UNIV FLORIDA10 patents · 552 citations
- 1829CORNING INC24 patents · 610 citations
- 1925HEWLETT PACKARD DEVELOPMENT CO93 patents · 1,343 citations
- 2021SAMSUNG ELECTRONICS CO LTD84 patents · 1,245 citations
- 2117XEROX CORP33 patents · 793 citations
- 2213HRL LAB LLC28 patents · 674 citations
- 238KIONIX INC17 patents · 476 citations
- 244UNIV CARNEGIE MELLON16 patents · 503 citations
- 251APPLIED MATERIALS INC46 patents · 659 citations
All-time canon
All-time PatentIndex Score in B81C
- 199UNIV ILLINOIS44 patents · 6,469 citations
- 296SILICON GENESIS CORP39 patents · 5,477 citations
- 392CALIFORNIA INST OF TECHN56 patents · 4,446 citations
- 488HARVARD COLLEGE36 patents · 5,234 citations
- 583PROCTER & GAMBLE9 patents · 3,838 citations
- 679CALIPER TECHN CORP7 patents · 2,084 citations
- 775TEXAS INSTRUMENTS INC220 patents · 5,196 citations
- 871UNIV LELAND STANFORD JUNIOR24 patents · 2,549 citations
- 967GEORGIA TECH RES INST24 patents · 3,363 citations
- 1063UNIV CALIFORNIA82 patents · 4,941 citations
- 1158SANDIA CORP43 patents · 4,302 citations
- 1254UNIV SOUTHERN CALIFORNIA12 patents · 990 citations
- 1350MOLECULAR IMPRINTS INC17 patents · 1,772 citations
- 1446CORNELL RES FOUNDATION INC25 patents · 2,654 citations
- 1542BOSCH GMBH ROBERT399 patents · 4,333 citations
- 1638KNOWLES ELECTRONICS LLC70 patents · 1,019 citations
- 1733NANOSYS INC9 patents · 1,087 citations
- 1829MOTOROLA INC19 patents · 1,520 citations
- 1925ANALOG DEVICES INC116 patents · 4,223 citations
- 2021AGILENT TECHNOLOGIES INC19 patents · 1,435 citations
- 2117REFLECTIVITY INC19 patents · 1,067 citations
- 2213MASSACHUSETTS INST TECHNOLOGY29 patents · 1,242 citations
- 238INVENSAS BONDING TECH INC14 patents · 764 citations
- 244INVENSENSE INC161 patents · 1,276 citations
- 251CANON KK81 patents · 1,485 citations
90–99 field-defining50–89 strong<50 emergingearned by citationsfrom family breadth