Topic leaderboard
Photomechanical production of patterned surfaces
Ranked by the PatentIndex Score — a 1–99 percentile within G03F · public-visibility date · generated 2026
top 25 per window · public-visibility date
Rising· last 2 yrs
Inventors whose newest G03F patents became public in the last 2 years — the current frontier
- 199Joseph M. Desimone44 patents · 3,524 citations
- 296Johannes Catharinus Hubertus Mulkens196 patents · 5,345 citations
- 392Jason P. Rolland48 patents · 1,783 citations
- 488Justin Poelma20 patents · 1,175 citations
- 583Kai Chen25 patents · 1,173 citations
- 679Lloyd M. Robeson19 patents · 1,170 citations
- 775James Goodrich18 patents · 1,169 citations
- 871Robert K. Pinschmidt, Jr.18 patents · 1,169 citations
- 967Sjoerd Nicolaas Lambertus Donders233 patents · 3,080 citations
- 1063Shinn-Sheng Yu119 patents · 2,840 citations
- 1158Ching-Yu Chang320 patents · 5,497 citations
- 1254Alexander I. Ershov123 patents · 5,571 citations
- 1350Jang Fung Chen93 patents · 2,735 citations
- 1446Igor V. Fomenkov119 patents · 5,758 citations
- 1542Arie Jeffrey Den Boef246 patents · 2,959 citations
- 1638Koji Asakawa62 patents · 1,985 citations
- 1733Mario Johannes Meissl51 patents · 1,770 citations
- 1829Mark Ghinovker73 patents · 1,636 citations
- 1925Steven R. J. Brueck24 patents · 1,778 citations
- 2021Soichi Inoue100 patents · 2,722 citations
- 2117Masaki Kato43 patents · 1,468 citations
- 2213Yen-Wen Lu43 patents · 746 citations
- 238Douglas A. Keszler33 patents · 1,027 citations
- 244Stephen T. Meyers35 patents · 957 citations
- 251Kai-Li Jiang35 patents · 938 citations
Active· last 5 yrs
Sustained G03F output across the last 5 years
- 199Erik Roelof Loopstra321 patents · 11,630 citations
- 296Joseph M. Desimone44 patents · 3,524 citations
- 392Johannes Catharinus Hubertus Mulkens196 patents · 5,345 citations
- 488Joeri Lof88 patents · 4,761 citations
- 583Christiaan Alexander Hoogendam191 patents · 4,698 citations
- 679Torbjorn Sandstrom88 patents · 3,312 citations
- 775Edward T. Samulski22 patents · 2,227 citations
- 871Helmar Van Santen79 patents · 3,734 citations
- 967Alexander Ermoshkin14 patents · 2,060 citations
- 1063Matthew E. Colburn75 patents · 3,041 citations
- 1158Byung-Jin Choi163 patents · 5,758 citations
- 1254Jason P. Rolland48 patents · 1,783 citations
- 1350Justin Poelma20 patents · 1,175 citations
- 1446Kai Chen25 patents · 1,173 citations
- 1542Lloyd M. Robeson19 patents · 1,170 citations
- 1638James Goodrich18 patents · 1,169 citations
- 1733Robert K. Pinschmidt, Jr.18 patents · 1,169 citations
- 1829Kenneth C. Johnson28 patents · 3,294 citations
- 1925Sjoerd Nicolaas Lambertus Donders233 patents · 3,080 citations
- 2021Sidlgata V. Sreenivasan125 patents · 4,989 citations
- 2117Jeroen Johannes Sophia Maria Mertens157 patents · 2,654 citations
- 2213Shinn-Sheng Yu119 patents · 2,840 citations
- 238Ady Levy69 patents · 3,717 citations
- 244Anthony Yen140 patents · 2,807 citations
- 251Jun Ye99 patents · 3,441 citations
All-time canon
Career PatentIndex Score in G03F
- 199Stephen P. A. Fodor57 patents · 29,478 citations
- 296Lubert Stryer36 patents · 20,051 citations
- 392J. Leighton Read29 patents · 18,080 citations
- 488Michael C. Pirrung29 patents · 18,080 citations
- 583William J. Dower18 patents · 9,047 citations
- 679Kenji Nishi128 patents · 11,840 citations
- 775Dennis W. Solas18 patents · 8,429 citations
- 871Erik Roelof Loopstra321 patents · 11,630 citations
- 967Glenn J. Leedy49 patents · 7,045 citations
- 1063Kazuya Ota66 patents · 5,971 citations
- 1158Joseph M. Desimone44 patents · 3,524 citations
- 1254Klaus Simon83 patents · 4,367 citations
- 1350Stephen Y. Chou40 patents · 4,439 citations
- 1446Alexander Straaijer82 patents · 5,049 citations
- 1542Johannes Catharinus Hubertus Mulkens196 patents · 5,345 citations
- 1638Joeri Lof88 patents · 4,761 citations
- 1733Bob Streefkerk188 patents · 4,735 citations
- 1829Christiaan Alexander Hoogendam191 patents · 4,698 citations
- 1925Larry J. Hornbeck5 patents · 3,823 citations
- 2021David S. Soane10 patents · 3,470 citations
- 2117Zoya M. Soane10 patents · 3,470 citations
- 2213Joannes Theodoor De Smit47 patents · 3,625 citations
- 238Roelof Aeilko Siebrand Ritsema35 patents · 3,389 citations
- 244Antonius Theodorus Anna Maria Derksen48 patents · 3,531 citations
- 251Torbjorn Sandstrom88 patents · 3,312 citations
Rising· last 2 yrs
The top-scoring G03F patents made public in the last 2 years
- 199US12307654B1✦ AIMethods for image simulation, pseudo-random defect dataset generation, and micro and nano 3 cites · 202580% earned
- 296US12278125B2✦ AIIntegrated dry processes for patterning radiation photoresist patterning8 cites · 202473% earned
- 392US12346035B2✦ AIProcess tool for dry removal of photoresist6 cites · 202474% earned
- 488US12027518B13D semiconductor devices and structures with metal layers4 cites · 202475% earned
- 583US12474640B2Integration of dry development and etch processes for EUV patterning in a single process c4 cites · 202575% earned
- 679US11971616B1Apparatus and method for creating highly-functional meta-materials from luminescing nanopa9 cites · 202469% earned
- 775US12090590B1Six-degree-of-freedom air-floating moving apparatus3 cites · 202480% earned
- 871US12060377B2High purity tin compounds containing unsaturated substituent and method for preparation th4 cites · 202467% earned
- 967US12510825B2Photoresist development with halide chemistries2 cites · 202458% earned
- 1063US12474638B2Underlayer for photoresist adhesion and dose reduction2 cites · 202458% earned
- 1158US11966156B2Lithography mask repair by simulation of photoresist thickness evolution3 cites · 202480% earned
- 1254US12105413B2Reflective mask blank, reflective mask, method of manufacturing reflective mask, and metho2 cites · 202458% earned
- 1350US12394677B2Semiconductor structure with overlay mark and system for manufacturing the same2 cites · 202458% earned
- 1446US12111566B2Reflective mask blank, reflective mask and manufacturing method thereof, and semiconductor2 cites · 202461% earned
- 1542US12216397B2Reflective mask blank for EUV lithography, mask blank for EUV lithography, and manufacturi2 cites · 202467% earned
- 1638US12001134B2Reflective mask blank, reflective mask, method of manufacturing reflective mask blank, and2 cites · 202467% earned
- 1733US12504692B2Cyclic development of metal oxide based photoresist for etch stop deterrence2 cites · 202467% earned
- 1829US12423773B2Image data processing method for laser imaging, computer device, and computer-readable sto2 cites · 202476% earned
- 1925US12230513B2Cross-wafer RDLs in constructed wafers1 cites · 202444% earned
- 2021US12105433B2Imaging overlay targets using moiré elements and rotational symmetry arrangements2 cites · 202461% earned
- 2117US12469089B1Advancement of earned wages via payroll service1 cites · 202556% earned
- 2213US12468223B2Imprinting apparatus2 cites · 202467% earned
- 238US12253805B2Scatterometry overlay metrology with orthogonal fine-pitch segmentation2 cites · 202476% earned
- 244US12209975B2Real-time detection of deflections and ruptures of EUV pellicle membranes2 cites · 202476% earned
- 251US12066322B2Single grab overlay measurement of tall targets2 cites · 202476% earned
Active· last 5 yrs
The top-scoring G03F patents of the last 5 years
- 199US11264357B1✦ AIMixed exposure for large die145 cites · 202290% earned
- 296US11360396B2✦ AIMode control of photonic crystal fiber based broadband radiation sources45 cites · 202183% earned
- 392US10983257B1✦ AIFabrication of self-aligned grating elements with high refractive index for waveguide disp46 cites · 202188% earned
- 488US11314168B2Underlayer for photoresist adhesion and dose reduction24 cites · 202280% earned
- 583US11306193B1Methods for forming ordered and disordered nanovoided composite polymers37 cites · 202291% earned
- 679US10990023B1Method and apparatus for diffraction-based overlay measurement22 cites · 202180% earned
- 775US12183604B2Integrated dry processes for patterning radiation photoresist patterning9 cites · 202374% earned
- 871US11079682B1Methods for extreme ultraviolet (EUV) resist patterning development18 cites · 202184% earned
- 967US11164307B1Misregistration metrology by using fringe Moiré and optical Moiré effects18 cites · 202189% earned
- 1063US12307654B1Methods for image simulation, pseudo-random defect dataset generation, and micro and nano 3 cites · 202580% earned
- 1158US11346768B1Vortex polarimeter15 cites · 202289% earned
- 1254US11428642B2Scanning scatterometry overlay measurement12 cites · 202288% earned
- 1350US11300524B1Pupil-plane beam scanning for metrology12 cites · 202288% earned
- 1446US12105422B2Photoresist development with halide chemistries13 cites · 202277% earned
- 1542US11067816B1Scattering STED lithography13 cites · 202188% earned
- 1638US12346035B2Process tool for dry removal of photoresist6 cites · 202474% earned
- 1733US12027518B13D semiconductor devices and structures with metal layers4 cites · 202475% earned
- 1829US12474640B2Integration of dry development and etch processes for EUV patterning in a single process c4 cites · 202575% earned
- 1925US11526086B2Multi-field scanning overlay metrology10 cites · 202287% earned
- 2021US11937492B2Mask assembly and manufacturing method thereof10 cites · 202287% earned
- 2117US11003828B1System and method for layout analysis using point of interest patterns and properties12 cites · 202188% earned
- 2213US11755814B2Method and apparatus for layout pattern selection11 cites · 202288% earned
- 238US11604149B2Metrology methods and optical schemes for measurement of misregistration by using hatched 9 cites · 202187% earned
- 244US11705332B2Photoresist layer surface treatment, cap layer, and method of forming photoresist pattern9 cites · 202187% earned
- 251US11531275B1Parallel scatterometry overlay metrology9 cites · 202287% earned
All-time canon
The defining G03F patents of the whole record
- 199US5143854A✦ AILarge scale photolithographic solid phase synthesis of polypeptides and receptor binding s3,709 cites · 199285% earned
- 296US5445934A✦ AIArray of oligonucleotides on a solid substrate3,129 cites · 199584% earned
- 392US9236267B2✦ AICut-mask patterning process for fin-like field effect transistor (FinFET) device3,095 cites · 201394% earned
- 488US5744305AArrays of materials attached to a substrate3,038 cites · 199887% earned
- 583US4575330AApparatus for production of three-dimensional objects by stereolithography2,017 cites · 198696% earned
- 679US5610683AImmersion type projection exposure apparatus1,933 cites · 199796% earned
- 775US6952253B2Lithographic apparatus and device manufacturing method1,825 cites · 200487% earned
- 871US5512131AFormation of microstamped patterns on surfaces and derivative articles1,825 cites · 199696% earned
- 967US5800992AMethod of detecting nucleic acids1,804 cites · 199888% earned
- 1063US4346164APhotolithographic method for the manufacture of integrated circuits1,769 cites · 198296% earned
- 1158US5424186AVery large scale immobilized polymer synthesis1,758 cites · 199593% earned
- 1254US5825043AFocusing and tilting adjustment system for lithography aligner, manufacturing apparatus or1,714 cites · 199893% earned
- 1350US5772905ANanoimprint lithography1,694 cites · 199896% earned
- 1446US5969441ATwo-dimensionally balanced positioning device with two object holders, and lithographic de1,609 cites · 199996% earned
- 1542US4509852AApparatus for the photolithographic manufacture of integrated circuit elements1,584 cites · 198596% earned
- 1638US4480910APattern forming apparatus1,548 cites · 198495% earned
- 1733US5715039AProjection exposure apparatus and method which uses multiple diffraction gratings in order1,390 cites · 199895% earned
- 1829US5523193AMethod and apparatus for patterning and imaging member1,388 cites · 199695% earned
- 1925US6582908B2Oligonucleotides1,335 cites · 200195% earned
- 2021US5229872AExposure device including an electrically aligned electronic mask for micropatterning1,335 cites · 199395% earned
- 2117US8816444B2System and methods for converting planar design to FinFET design1,298 cites · 201293% earned
- 2213US5510270ASynthesis and screening of immobilized oligonucleotide arrays1,288 cites · 199683% earned
- 238US5296891AIllumination device1,222 cites · 199495% earned
- 244US5061049ASpatial light modulator and method1,150 cites · 199195% earned
- 251US4491628APositive- and negative-working resist compositions with acid generating photoinitiator and1,048 cites · 198595% earned
Rising· last 2 yrs
Assignees whose newest G03F patents became public in the last 2 years — the current frontier
- 199NIKON CORP2,305 patents · 80,808 citations
- 296ASML NETHERLANDS BV3,501 patents · 31,606 citations
- 392IBM1,822 patents · 53,644 citations
- 488APPLIED MATERIALS INC616 patents · 10,653 citations
- 583CANON KK3,387 patents · 52,624 citations
- 679TOKYO ELECTRON LTD1,057 patents · 17,602 citations
- 775COMMISSARIAT ENERGIE ATOMIQUE65 patents · 1,917 citations
- 871ASML HOLDING NV423 patents · 4,412 citations
- 967UNIV CALIFORNIA124 patents · 7,618 citations
- 1063MOLECULAR IMPRINTS INC142 patents · 5,266 citations
- 1158MICRON TECHNOLOGY INC719 patents · 13,536 citations
- 1254TAIWAN SEMICONDUCTOR MFG CO LTD2,014 patents · 4,621 citations
- 1350SYNOPSYS INC220 patents · 4,191 citations
- 1446UNIV LELAND STANFORD JUNIOR28 patents · 2,903 citations
- 1542LAM RES CORP139 patents · 2,873 citations
- 1638INTEL CORP418 patents · 7,010 citations
- 1733CADENCE DESIGN SYSTEMS INC57 patents · 2,101 citations
- 1829EASTMAN KODAK CO469 patents · 9,067 citations
- 1925INPRIA CORP55 patents · 1,023 citations
- 2021SHINETSU CHEMICAL CO1,137 patents · 9,620 citations
- 2117BREWER SCIENCE INC87 patents · 2,440 citations
- 2213SAMSUNG ELECTRONICS CO LTD1,347 patents · 7,263 citations
- 238CARBON INC39 patents · 559 citations
- 244MERCK PATENT GMBH77 patents · 1,221 citations
- 251MITSUBISHI GAS CHEMICAL CO80 patents · 1,101 citations
Active· last 5 yrs
Sustained G03F output across the last 5 years
- 199NIKON CORP2,305 patents · 80,808 citations
- 296ASML NETHERLANDS BV3,501 patents · 31,606 citations
- 392TEXAS INSTRUMENTS INC255 patents · 12,932 citations
- 488HITACHI LTD474 patents · 18,078 citations
- 583UNIV TEXAS77 patents · 4,230 citations
- 679IBM1,822 patents · 53,644 citations
- 775HARVARD COLLEGE23 patents · 4,883 citations
- 871TOSHIBA KK858 patents · 18,337 citations
- 967APPLIED MATERIALS INC616 patents · 10,653 citations
- 1063CANON KK3,387 patents · 52,624 citations
- 1158TOKYO ELECTRON LTD1,057 patents · 17,602 citations
- 12543D SYSTEMS INC67 patents · 7,432 citations
- 1350COMMISSARIAT ENERGIE ATOMIQUE65 patents · 1,917 citations
- 1446MASSACHUSETTS INST TECHNOLOGY129 patents · 7,126 citations
- 1542ASML HOLDING NV423 patents · 4,412 citations
- 1638GEN ELECTRIC96 patents · 6,012 citations
- 1733UNIV CALIFORNIA124 patents · 7,618 citations
- 1829MOLECULAR IMPRINTS INC142 patents · 5,266 citations
- 1925KLA TENCOR CORP454 patents · 5,268 citations
- 2021MICRON TECHNOLOGY INC719 patents · 13,536 citations
- 2117TAIWAN SEMICONDUCTOR MFG CO LTD2,014 patents · 4,621 citations
- 2213UNIV ILLINOIS25 patents · 2,216 citations
- 238SYNOPSYS INC220 patents · 4,191 citations
- 244UNIV LELAND STANFORD JUNIOR28 patents · 2,903 citations
- 251LAM RES CORP139 patents · 2,873 citations
All-time canon
All-time PatentIndex Score in G03F
- 199AFFYMAX TECH NV10 patents · 13,741 citations
- 296AFFYMETRIX INC61 patents · 14,699 citations
- 392NIKON CORP2,305 patents · 80,808 citations
- 488ASML NETHERLANDS BV3,501 patents · 31,606 citations
- 583CARBON3D INC11 patents · 2,885 citations
- 679TEXAS INSTRUMENTS INC255 patents · 12,932 citations
- 775HITACHI LTD474 patents · 18,078 citations
- 871ELM TECHNOLOGY CORP28 patents · 3,334 citations
- 967MICRONIC LASER SYSTEMS AB84 patents · 3,506 citations
- 1063ASM LITHOGRAPHY BV25 patents · 4,799 citations
- 1158UNIV TEXAS77 patents · 4,230 citations
- 1254IBM1,822 patents · 53,644 citations
- 1350HARVARD COLLEGE23 patents · 4,883 citations
- 1446SYMBOL TECHNOLOGIES INC6 patents · 3,367 citations
- 1542TOSHIBA KK858 patents · 18,337 citations
- 1638APPLIED MATERIALS INC616 patents · 10,653 citations
- 1733UNIV MINNESOTA9 patents · 3,154 citations
- 1829HYUNDAI ELECTRONICS IND195 patents · 7,232 citations
- 1925CANON KK3,387 patents · 52,624 citations
- 2021NIKON PRECISION INC15 patents · 4,157 citations
- 2117TAIWAN SEMICONDUCTOR MFG693 patents · 12,190 citations
- 2213TOKYO ELECTRON LTD1,057 patents · 17,602 citations
- 238LSI LOGIC CORP146 patents · 8,479 citations
- 244HYNIX SEMICONDUCTOR INC231 patents · 3,800 citations
- 2513D SYSTEMS INC67 patents · 7,432 citations
90–99 field-defining50–89 strong<50 emergingearned by citationsfrom family breadth